Samsung Electronics Co., Ltd.

Semes Co., Ltd.

Seung-Bae Lee

Jung-Man Lim

Sung-Chul Kim

Kyung-Won Park

Young-Chul Joung

Tae-Young Ha

Jung-Won Chang

Se-ll Kim

Il-Ho Noh

Se-Il Kim

Ki-Choul An

A display module includes a display panel, a driver integrated circuit, a flexible printed circuit (FPC), a drive signal wiring and a power wiring. The driver integrated circuit applies power and a drive signal to the display panel. The FPC is electrically connected between the driver integrated circuit and a PCB. The drive signal wiring is extended from the FPC to the display panel through the driver integrated circuit and may transmit the drive signal to the display panel. The power wiring transmits the power to the display panel. The power wiring includes a first power line extended from the FPC to the driver integrated circuit, and a second power line extended from the first power line to the display panel. The second power line does not intersect the drive signal wiring, and a ground slit is not generated.

Display module with dual power lines

Provided is a connection structure capable of reducing the distortion of a signal. The connection structure includes a first interconnection layer including a plurality of signal lines configured to transmit an operating signal generated by a driver to a receiver; a second interconnection layer including at least one ground line configured to connect the driver and ground terminals of the receiver; and an insulating layer interposed between the first and second interconnection layers to electrically insulate the signal lines from the ground line.

Connection structures capable of reducing distortion of signal

In a substrate processing apparatus for forming thin layers on a substrate used for an organic light emitting diode, the apparatus includes a mask attaching chamber, a deposition chamber and a mask detaching chamber. The mask attaching chamber, the deposition chamber and the mask detaching chamber are provided with a transferring guide installed thereinside, and a substrate supporter for supporting the substrate moves along the transferring guide in or between the chambers. Thus, a time for processing the substrate and an area for the apparatus may be reduced. Also, the chambers are grouped in one or more, and a gate valve is installed between the grouped chambers for opening and closing a path between the grouped chambers. Accordingly, the chambers may be continuously maintained in a vacuum state when any one of the chambers is repaired.

Apparatus for processing substrate

A slurry distribution system for supplying slurry used in the planarization process of a wafer surface by chemical reaction is provided with a movable supply line having an open end which is maintained at a constant depth below the surface of the slurry in the slurry tank. The movable supply line penetrates the top of the tank and is supported for vertical movement in an opening in the top of the tank. The other end of the movable supply line is located outside the tank and is connected to a main supply line which leads to CMP equipment. A pleated flexible tubing allows the movable supply line to move vertically relative to the main supply line and the top of the tank. A position-controlling mechanism keeps the open end of the movable supply line at a predetermined distance below the top surface of the slurry in the tank as the top surface rises and falls, by moving the movable supply line vertically in accordance with the changing amount of slurry inside the tank. Keeping the open end of the movable supply line at a predetermined depth below the top surface of the slurry prevents distorted and lumped slurry residue which may be present at the bottom of the tank from entering the movable supply line.

Slurry distribution system for a CMP process in semiconductor device

Growing community of inventors

Suwon, South Korea

Seung-Bae Lee