Samsung Display Co., Ltd.

Samsung Electronics Co., Ltd.

Seulgi Han

Dongha Lee

Soohyun Park

Jongjang Park

Woohyeok Jeong

Donghwan Kim

Donghoon Kwak

Seoksoon Back

Seunguk Noh

Inchul Shin

Wonhyeok Jo

Hyein Cho

A substrate treating apparatus includes a chamber having a gate through which a substrate is loaded into the chamber and unloaded from the chamber, a gas supply unit in an upper portion in the chamber and configured to supply gas into the chamber, a spin coater in a lower portion in the chamber and including a spin chuck configured to support and rotate the substrate on an upper surface thereof and a cup portion extending around the substrate and configured to collect and discharge a chemical liquid from the substrate, a chemical liquid supply unit configured to supply a chemical liquid onto the substrate, and a heater between the substrate and the gas supply unit and configured to heat the substrate.

Substrate treating apparatus

A method for manufacturing a semiconductor device may include: forming a first layer comprising a plurality of patterns, each pattern having a different respective pitch; performing exposure and development to form a second layer at a layer different from the first layer; determining whether a pitch shift of a part of exposure patterns formed is within a tolerance range, using a Moiré pattern; and performing etching for the second layer when the pitch shift of the part of exposure patterns is determined to be within the tolerance range. Performing the exposure and the development may include forming a first exposure pattern corresponding to a key pattern having a first pitch, forming a second exposure pattern corresponding to a cell pattern having a second pitch, and forming a third exposure pattern corresponding to a middle pitch pattern having a third pitch between the first pitch and the second pitch.

Methods for manufacturing semiconductor devices using MOIRÉ patterns

An electronic device includes a base layer, a first electrode disposed on the base layer, a pixel defining layer disposed on the base layer and having an opening that exposes an upper surface of the first electrode, a hole transport region disposed in the opening and having a thickness that gradually decreases from a center of the opening toward a side surface of the pixel defining layer, an emission layer disposed on the hole transport region and having a thickness that gradually increases from the center of the opening toward the side surface of the pixel defining layer, an electron transport region disposed on the emission layer, and a second electrode disposed on the electron transport region. This electronic device may increase a light-emitting area exhibiting uniform (or substantially uniform) light-emitting characteristics and exhibit high light-emitting efficiency.

Electronic device including a light-emitting element having functional layers with thickness profiles

A method of manufacturing a display device includes forming a first electrode on a substrate, forming a bank layer on the first electrode, wherein the bank layer includes an opening portion exposing at least a portion of the first electrode, forming a first bank layer and a second bank layer by baking the bank layer, wherein the second bank layer is on the first bank layer and has liquid repellency, forming a first layer on the first electrode, and forming a third bank layer and a fourth bank layer by baking the first bank layer and the second bank layer, wherein the fourth bank layer is on the third bank layer and has liquid repellency, wherein the fourth bank layer is thinner than the second bank layer.

Method of manufacturing display device

An organic light-emitting display device including a driving element including an active pattern and a gate electrode, an insulation layer covering the driving element, a first diode electrode disposed on the insulation layer and electrically connected to the driving element, a pixel-defining layer disposed on the insulation layer and including a side surface defining an opening overlapping at least a portion of the first diode electrode, an edge-compensation part including an organic material and disposed in a peripheral area of the opening, an organic light-emitting layer disposed on the first diode electrode and the edge-compensation part, and a second diode electrode disposed on the organic light-emitting layer, in which the edge-compensation part includes an inclined surface contacting the organic light-emitting layer, and a taper angle of the inclined surface of the edge-compensation part is less than a taper angle of the side surface of the pixel-defining layer.

Growing community of inventors

Suwon-si, South Korea

Seulgi Han