Ebara Corporation

Setsuji Shinoda

Nobuharu Noji

Toshiharu Nakazawa

Shunichi Aiyoshizawa

The present apparatus includes a casing () having a gas introduction opening () for introducing a gas into the casing and a gas discharge opening () for discharging the gas from the casing, a gas circulating tube passage () communicating with the casing for effecting circulation of the gas, a circulating fan () for effecting circulation of the gas in the casing through the gas circulating tube passage, and a valve () switchable between a position for conducting the introducing and discharging of the gas into and from the casing through the gas introduction opening and the gas discharge opening and a position for effecting circulation of the gas in the casing through the gas circulating tube passage. The apparatus further includes a trap (), a filter () and a heat exchanger () for conducting a desired treatment with respect to the circulated gas, such as removal of particles.

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Kanagawa, Japan

Setsuji Shinoda