Saes Getters S.p.a.

Saes Pure Gas, Inc.

Sergio Carella

Andrea Conte

D'Arcy H Lorimer

Gordon P Krueger

Claudio Boffito

Fortunato Belloni

A getter pump module includes a number of getter disks provided with axial holes, and a heating element which extends through the holes to support and heat the getter disks. The getter disks are preferably solid, porous, sintered getter disks that are provided with a titanium hub that engages the heating element. A thermally isolating shield is provided to shield the getter disks from heat sources and heat sinks within the chamber, and to aid in the rapid regeneration of the getter disks. In certain embodiments of the present invention the heat shields are fixed, and in other embodiments the heat shield is movable. In one embodiment, a focus shield is provided to reflect thermal energy to the getter material from an external heater element and provide high pumping speeds. An embodiment of the present invention also provides for a rotating getter element to enhance getter material utilization.

Getter pump module and system

An improved getter pump module includes a number of getter elements and a heating element that heats the getter elements. The getter elements are preferably porous, sintered getter disks. The heating element is disposed proximate to the getter elements and provides heat to activate the getter material and cause it to pump desired gasses. The getter elements and heater element are partially surrounded by a focus shield that is positioned between the getter elements and a wall of a processing chamber that encloses the getter elements, the heater element, and the focus shield. The focus shield is provided to reflect thermal energy to the getter material from the heater element, to provide high pumping speeds or short activation/baking times, and to reduce the heat seen by the chamber from the heating element. In certain embodiments of the present invention the focus shield is angled as to be wedge shaped, and may include planar extension portions. Multiple focus shields are provided in some embodiments.

Getter pump module and system including focus shields

A process is disclosed for producing non-evaporable getter materials having high porosity and improved gas sorption rates. The process includes mixing together a metallic getter element, a getter alloy and a solid organic compound, all three components being in the form of powders having specific particle sizes. The mixture is subjected to a compression of less than about 1000 kg/cm.sup.2 and is sintered at a temperature between about 900.degree. C. and about 1200.degree. C. for a period between about 5 minutes and about 60 minutes. The getter material thus obtained is used to produce getter bodies shaped as pellets, sheets or discs having better mechanical strength than similar bodies of other getter material having comparable porosity.

Process for producing high-porosity non-evaporable getter materials

A process for producing a field emitter flat display includes providing a supported porous layer of a non-evaporable getter material by depositing the non-evaporable getter material on a substrate followed by sintering the deposited material. The substrate having the porous layer of non-evaporable getter material thereon is then housed in an inner space defined by opposing plates. The inner space is then evacuated and hermetically sealed. The non-evaporable getter material is preferably deposited by preparing a suspension of non-evaporable getter material particles in a suspending medium, coating a surface of a substrate with the suspension by, e.g., spraying, and sintering the coating.

Field emitter flat display containing a getter and process for obtaining

A process is disclosed for producing non-evaporable getter materials having high porosity and improved gas absorption rates. The process includes mixing together a metallic getter element, a getter alloy and a solid organic compound, all three components being in the form of powders having specific particle sizes. The mixture is subjected to a compression of less than about 1000 kg/cm.sup.2 and is sintered at a temperature between about 900.degree. C. and about 1200.degree. C. for a period between about 5 minutes and about 60 minutes. The getter material thus obtained is used to produce getter bodies shaped as pellets, sheets or discs having better mechanical strength than similar bodies of other getter material having comparable porosity.

Method for pumping a chamber using an in situ getter pump

A getter pump module includes a number of getter disks provided with axial holes, and a heating element which extends through the holes to support and heat the getter disks. The getter disks are preferably solid, porous, sintered getter disks that are provided with a titanium hub that engages the heating element. A thermally isolating shield is provided to shield the getter disks from heat sources and heat sinks within the chamber, and to aid in the rapid regeneration of the getter disks. In certain embodiments of the present invention the heat shields are fixed, and in other embodiments the heat shield is movable. An embodiment of the present invention also provides for a rotating getter element to enhance getter material utilization.

Process for producing high-porosity non-evaporable getter materials and

A compact getter pump, compatible with size limitations of portable apparatus is described. In one embodiment a getter device and a heating apparatus capable of heating getter elements to a desired temperature, are contained within a thermally insulating housing comprised of a plurality of nested thermally insulating shields with an open end. The open end of at least one of the shields is covered with a particle trap. In another embodiment, each of the nested thermally insulating shields is of a substantially cylindrical shape and is substantially coaxially disposed along an axis defined by the heating apparatus. In one embodiment a plurality of getter elements and a heating apparatus are enclosed by three nested evenly spaced cylindrical metal shields that have open ends and are coaxially disposed along an axis defined by the getter elements and the heating apparatus. The open end of the metal shield closest to the getter elements is covered by a wire mesh screen whose apertures are of larger size than the apertures of the wire mesh screen covering the open end of the adjacent metal shield.

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Varese, Italy

Sergio Carella