Qc Optics, Inc.

Resonetics, Inc.

Sergey V Broude

Eric T Chase

Jay L Ormsby

Carl E Johnson

Nicholas C Allen

Pascal Miller

Abdu Boudour

David L Wall

George S Quackenbos

David S Holbrook

Kenneth Todd McDaniel

Arkady Savikovsky

Abdu Broudour

Rong Gu

Koichi Nishine

Lloyd P Quackenbos

Chen-Hsiung Cheng

David Giroux

Abdu Bou Dour

Bruno Rostaing

Glenn Ogura

Kenneth T Mcdaniel

Methods and systems for drilling precise orifices in a wall of non-uniform thickness are provided. In one aspect, a thickness profile of at least a portion of the wall is created and the wall is irradiated with at least one laser beam to ablate a portion of the wall to thereby form an orifice in the wall. During the irradiation, one or more parameters of the least one laser beam are adjusted one or more times in accordance with the thickness profile to compensate for the non-uniform thickness of the wall.

Wall thickness compensation during laser orifice drilling

A laser machining system for machining a work-piece includes a laser scanning head, external optical subsystems, and an image acquisition device. The external optical subsystems correspond to optical channels that include a first optical channel and a second optical channel. The laser scanning head controls an optical path so that a laser beam is directed and focused on the work-piece through the first optical channel and the second optical channel at different times. The first optical channel and the second optical channel correspond to respective specific portions of the work-piece to be machined by the laser beam. The image acquisition device is positioned to view the work-piece through the optical path. The image acquisition device acquires via the first optical channel one or more images of the work-piece to determine a displacement of the work-piece with reference to a best optical focus position of the second optical channel.

Laser machining system and method for machining three-dimensional objects from a plurality of directions

Embodiments of the present disclosure are directed to systems (), devices and methods for machining a work-piece from a plurality of directions using a single laser beam and galvanometer scan head (). In some embodiments, such a system includes, for example, a scanning galvanometer head ('scan-head') (), having one or more mirrors () for directing a laser beam in at least one plane. Preferably, in some embodiments, the scan-head includes two mirrors for deflecting the laser beam in the at least one plane (e.g., an X-Y plane). A plurality of second mirrors (A,B,C) is arranged after the scan-head () to direct the laser onto a predetermined portion of the exterior of the object to be machined. In some preferred embodiments, there are three such second mirrors (A,B,C) each to direct the laser over a 120 degree area of the object. In some embodiments, a single, large-field focusing lens is also included to focus the laser output from the scan-head, while in other embodiments, each second mirror includes a corresponding focusing lens (A,B,C). One or more of the beams effecting machining of the work-piece may be unfolded.

Methods and systems for precisely removing selected layers of materials from a multi-layer work piece using laser ablation are disclosed. Precise removal of one or more selected layers of materials of a work piece may be performed by irradiating at least one location on a multi-layer work piece with a laser beam, ablating material at the at least one location, detecting one or more characteristics of the material ablated at the at least one location and analyzing the one or more characteristics to identify a change in at least one of the one or more characteristics that indicates a change in the type of material being ablated. Related systems are also described.

Precision laser ablation

Embodiments of the present invention are directed to methods and systems for micromachining a conical surface. In one embodiment, such a system may include a rotating platform for receiving a long line of laser illumination, a mask having a predetermined pattern comprising a sector of a planar ring, the mask being positioned on the rotating platform, a workpiece stage having a rotational axis for rotating a removably-affixed workpiece comprising a conical surface, wherein the sector comprises the planar image of the conical surface, an excimer laser for producing a laser beam, a homogenizer for homogenizing the laser beam in at least a single direction, at least one condenser lens, a turning mirror and at least one projection lens.

Method and apparatus for laser micromachining a conical surface

Embodiments of the present invention are directed to an illuminating optical device for forming a field of illumination. The optical device includes a first one-dimensional homogenizer positioned to homogenize a first dimension/axis of the field of illumination and a second one-dimensional homogenizer positioned to homogenize a second dimension/axis of the field of illumination.

Methods and apparatuses for homogenizing light

An improved high sensitivity optical inspection system for detecting flaws on a diffractive surface containing surface patterns includes: a first and a second illumination means for illuminating predetermined regions on the diffractive surface to generate a scattered intensity distribution in response to either a flaw or a surface pattern; means for detecting the intensity level of the scattered intensity distribution at a plurality of locations about the diffractive surface; means for establishing a minimum detected intensity level; means, responsive to the minimum detected intensity level, for indicating the absence of a flaw on the illuminated region of the diffractive surface when the minimum detected intensity level is below a threshold intensity level and for indicating the presence of a flaw on the illuminated region of the diffractive surface when the minimum detected intensity level exceeds the threshold intensity level; and means for moving the diffractive surface to generate a scan pattern on the diffractive surface to inspect the entire surface.

High sensitivity optical inspection system and method for detecting flaws on a diffractive surface

An inspection system and an inspection method, the method including detecting flaws on a surface, determining the size, count, and position of flaws on the surface, providing a representation of the detected flaws by size, count, and position on a display, setting a display threshold value which is a function of a number of particles of a particular size to be displayed on the display, determining when the display threshold is breached and in response adjusting the display to cease displaying those flaws, storing at least one inspection threshold value, and determining when the inspection threshold value is breached and in response outputting an inspection interrupt signal to stop the inspection after the inspection threshold value is breached.

Multistation surface inspection system

A pellicle reflectivity monitoring system comprising a radiation source for directing radiation through a pellicle to an object to be inspected, a sensor device positioned to receive the portion of the radiation reflected by the pellicle, a processor, responsive to the sensor device, for determining the intensity of the portion of the radiation reflected by the pellicle, and a lens assembly, positioned in an optical path between the pellicle and the sensor device, for directing the portion of the radiation reflected by pellicles of different heights onto the sensor device. A comparator device compares the intensity of the radiation directed at the object to be inspected with the intensity of the portion of the radiation reflected by the pellicle and outputs a correction factor based on the comparison in order to compensate for the portion of the radiation reflected by the pellicle.

Pellicle reflectivity monitoring system having means for compensating

A plate holder for a plate surface inspection system, the plate holder including a plate holder body and a calibration plate integral with the plate holder body thereby eliminating the need to load a separate special calibration plate in the plate holder each time the surface inspection system needs to be calibrated.

Plate holder for a surface inspection system

A surface displacement detection system including a detector for detecting displacement of a surface in a direction normal to the surface as the surface revolves; an encoder which divides the surface into N sectors; a signal processor responsive to the detector for calculating the amount of displacement of the surface in each sector of the surface as it revolves; a displacement value look-up table; and a routine for writing to the table a displacement value for each sector once per M revolutions, and an adjustment system including a focussing actuating element, a routine to read displacement value look-up table, a routine to for updating the position of the focussing actuating element for every sector, according to the displacement values stored in the look-up table.

Surface displacement detection and adjustment system

An improved optical inspection system for detecting flaws on a diffractive surface containing surface patterns includes: an ultraviolet illumination means for illuminating a region on the diffractive surface to generate a scattered intensity distribution in response to either a flaw or a surface pattern; means for detecting the intensity level of the scattered intensity distribution at a plurality of locations about the diffractive surface; means for establishing a minimum detected intensity level; means, responsive to the minimum detected intensity level, for indicating the absence of a flaw on the illuminated region of the diffractive surface when the minimum detected intensity level is below a threshold intensity level and for indicating the presence of a flaw on the illuminated region of the diffractive surface when the minimum detected intensity level exceeds the threshold intensity level; and means for moving the diffractive surface to generate a scan pattern on the diffractive surface to inspect the entire surface.

Optical inspection system and method for detecting flaws on a

A system for detecting displacement of a surface in a direction normal to the surface, the system including a first grating; a second grating; an optical subsystem for projecting an image of the first grating onto the surface and for directing a secondary image of the first grating reflected off the surface onto the second grating; and a detector, responsive to the fringe pattern formed after the secondary image passes through the second grating, for detecting displacement of the surface in a direction normal to the surface.

Displacement detection system

A system for processing particle size and position data for a surface under inspection, the system including an air spindle for rotating and a translation stage for translating the surface with respect to a beam of radiation used to detect particles on the surface; a rotational encoder for dividing the surface into a number N of angular vectors; a counter of counting the number of revolutions of the surface; a processor for collecting particle size and position data at each angular vector during each revolution; first and second FIFO memories having at least N address spaces, each address space allocated for a specific angular vector; and a routine for writing the collected particle size and position data to the first memory and for reading particle size and position data from the second memory and switching memories every M revolutions. The FIFO memories are programmed to store only the greater of stored size data and incoming size data.

Data processing system and method for a surface inspection apparatus

A surface pit and mound detection and discrimination system including a device for scanning a beam of radiation over a surface, and a mechanism for detecting a local slope on the surface for differentiating between whether the beam of radiation is scanning a pit or a mound on the surface.

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Newton Centre, MA, United States of America

Sergey V Broude