Samsung Display Co., Ltd.

Seon-II Kim

Hong Sick Park

Hoon Jong Kang

Hyang-Shik Kong

Min Hyuck Kang

Jong-Hyun Choung

Jin Ho Ju

Yeun Tae Kim

Ki-beom Lee

Woo-Seok Jeon

Seung Bo Shim

Chang Oh Jeong

Gwui-Hyun Park

Bong-Yeon Kim

Jong Kwang Lee

In-Bae Kim

Sam-Young Cho

Jae Woo Jeong

Min Ho Moon

Gyu-po Kim

Won-guk Seo

Hyun-cheol Shin

Seung-yeon Han

The present invention relates to a display device and a manufacturing method thereof, wherein a spoilage layer generated in a manufacturing process is removed, and a manufacturing method of a display device according to an exemplary embodiment of the present invention includes: forming a thin film transistor on a substrate including a plurality of pixel areas; forming a pixel electrode connected to the thin film transistor in the pixel area; forming a sacrificial layer on the pixel electrode; forming a barrier layer on the sacrificial layer; forming a common electrode on the barrier layer; forming a roof layer on the common electrode; patterning the barrier layer, the common electrode, and the roof layer to exposed a portion of the sacrificial layer thereby forming an injection hole; removing the sacrificial layer to form a microcavity for a plurality of pixel areas; removing the barrier layer.

Display device and manufacturing method thereof

A method for forming a fine exposure pattern where a width and an interval of the pattern are each 1CD, by first exposing a photoresist by using an exposure mask where an interval ratio of a light shielding part and a light transmission part is 2CD:1CD to 4CD:1CD, and then second exposing the photoresist after the exposure mask is shifted at a predetermined interval, or second exposing the photoresist by using an exposure mask formed at a position where a light transmission part is shifted at a predetermined interval, and developing the photoresist, such that it is possible to form a display device having a pixel electrode including a plurality of fine branch electrodes having a smaller width and interval than a resolution of an exposure apparatus.

Method for forming pattern and method for manufacturing display device by using the same

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Seoul, South Korea

Seon-II Kim