Semes Co., Ltd.

Seokhee Kim

Seungwon Kim

Yong Hun Sim

Jun Cheol Park

Jinwook Jung

Jaehee Hwang

A storage apparatus for storing an object includes a load port unit that a receptacle is loaded onto or unloaded from, in which the receptacle accommodates the object in a storage space formed by a body and a cover that covers the body, and a controller. The load port unit includes a housing having an interior space, a stage member that is provided on the housing and that opens the storage space by moving the body, the receptacle being seated on the stage member, and an exhaust tube that evacuates a spacing space between the body and the cover spaced apart from each other. One end of the exhaust tube faces toward the spacing space, and an opposite end of the exhaust tube faces toward the interior space.

Growing community of inventors

Seoul, South Korea

Seokhee Kim