Samsung Electronics Co., Ltd.

Seog Soon Baek

Yong-soo Oh

Hyeon-Cheol Kim

Keon Kuk

Chang-seung Lee

Sang-hyun Lee

Jae-sik Min

Sang-wook Lee

Jong-cheol Shin

Kwang-joon Yoon

Myung-jong Kwon

A method for manufacturing the same, wherein the monolithic ink-jet printhead includes a manifold for supplying ink, an ink chamber having a hemispheric shape, and an ink channel formed monolithically on a substrate; a silicon oxide layer, in which a nozzle for ejecting ink is centrally formed in the ink chamber, is deposited on the substrate; a heater having a ring shape is formed on the silicon oxide layer to surround the nozzle; a MOS integrated circuit is mounted on the substrate to drive the heater and includes a MOSFET and electrodes connected to the heater. The silicon oxide layer, the heater, and the MOS integrated circuit are formed monolithically on the substrate. Additionally, a DLC coating layer having a high hydrophobic property and high durability is formed on an external surface of the printhead.

Method for manufacturing a monolithic ink-jet printhead

A monolithic ink-jet printhead, and a method for manufacturing the same, wherein the monolithic ink-jet printhead includes a manifold for supplying ink, an ink chamber having a hemispheric shape, and an ink channel formed monolithically on a substrate; a silicon oxide layer, in which a nozzle for ejecting ink is centrally formed in the ink chamber, is deposited on the substrate; a heater having a ring shape is formed on the silicon oxide layer to surround the nozzle; a MOS integrated circuit is mounted on the substrate to drive the heater and includes a MOSFET and electrodes connected to the heater. The silicon oxide layer, the heater, and the MOS integrated circuit are formed monolithically on the substrate. Additionally, a DLC coating layer having a high hydrophobic property and high durability is formed on an external surface of the printhead.

Monolithic ink-jet printhead

A bubble-jet type inkjet printhead is disclosed, wherein a manifold for supplying ink, an ink chamber having a substantially hemispherical shape and filled with ink to be ejected, and an ink channel for supplying ink from the manifold to the ink chamber, are incorporated in a substrate. A nozzle plate having a nozzle, through which ink is ejected at the center of the ink chamber, is formed on the substrate. A heater is provided on the nozzle plate and surrounding the nozzle, and electrodes are provided on the nozzle plate and electrically connected to the heater to supply pulse current to the heater. An anti-wetting coating including a perfluorinated alkene compound on at least a surface around the nozzle is formed on an exposed surface of the printhead. Preferably, the anti-wetting coating is deposited by RF glow discharge and can be removed by O plasma.

Bubble-jet type inkjet printhead

An inkjet printhead includes a nozzle plate having a nozzle, a substrate having an ink feed hole, and an intermediate layer interposed between the nozzle plate and the substrate, wherein the intermediate layer includes an ink chamber connected to the ink feed hole and the nozzle and a heating element surrounding the ink chamber. In the present invention, the nozzle, the ink chamber, and the ink feed hole are formed in a straight channel, thereby providing a high density printhead.

Ink-jet printhead having high nozzle density

Growing community of inventors

Suwon, South Korea

Seog Soon Baek