Hitachi, Ltd.

Sensuke Okada

Toshiyuki Kajiwara

Tomoaki Kimura

Keiichi Kuniya

Mitsuo Nihei

Masahisa Sobue

Kimihiko Akahori

Toshimi Sasaki

Hajime Murakami

Satoshi Ichimura

Yasuhiro Mochizuki

Eiji Setoyama

Satoshi Takemori

Hirofumi Seki

Kouji Ishiguro

Dielectric bodies are arranged in waveguide portions for passing microwave radiation and for holding a plasma generating chamber 25 at a vacuum. The dielectric bodies are arranged to intersect at least an electron cyclotron resonance area of the waveguide portions. A tip end portion of the dielectric bodies at a side of the plasma generating chamber are positioned toward at a side of the plasma generating chamber from an intermediate portion in an axial direction length of a first permanent magnet which is arranged by enclosing an outer periphery of the waveguide portions, and a tip end portion of the dielectric bodies at a side of the plasma generating chamber is substantially consistent with an inner face of the plasma generating chamber.

Plasma processing apparatus with a dielectric body in the waveguide

A roller for rolling mill comprising an entirely non-metallic sintered body composed principally of at least one material selected from silicon carbide, silicon nitride, sialon, alumina and zirconia and having a relative density which is at least 96% of the theoretical density, the roller having an initial crown in the range of -300 .mu.m to +300 .mu.m, is provided. This roller for rolling mill has a high hardness and high wear resistance and can be used as a work roll.

Rollers for rolling mills

A roller for rolling mill comprising an entirely non-metallic sintered body composed principally of at least one material selected from silicon carbide, silicon nitride, sialon, alumina and zirconia and having a relative density which is at least 96% of the theoretical density of the sintered body, the roller having an initial crown in the range of -300 .mu.m to +300 .mu.m, is provided. This roller for rolling mill has a high hardness and high wear resistance and can be used as a work roll.

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Hitachinaka, Japan

Sensuke Okada