Kyocera Corporation

Senri Tsujitake

Shoji Kohsaka

Yasuharu Tateyama

Yoshinori Hirano

Naoya Fujita

A semiconductive ceramic member according to the present disclosure contains a plurality of aluminum oxide crystal grains, and a plurality of titanium oxide crystal grains. The total content of aluminum oxide and titanium oxide is 99% by mass or more per 100% by mass of all constituents. The content of the aluminum oxide is 86% by mass or more and 96% by mass or less and the content of the titanium oxide is 4% by mass or more and 14% by mass or less per 100% by mass of the aluminum oxide and the titanium oxide in total. A peak of TiO(0<x<2) is present within a binding energy range of 456 eV to 462 eV (both inclusive) in X-ray photoelectron spectroscopy measurement. The semiconductive ceramic member further contains silicon, and the content of the silicon in terms of its oxide in a first region is larger than the content of the silicon in terms of its oxide in a grain boundary.

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Kirishima, Japan

Senri Tsujitake