Semiconductor Manufacturing International (shanghai) Corporation

Semiconductor Manufacturing International (beijing) Corporation

Sen Sheng Li

Xi Lin

Yi Hua Shen

A self-heating effect apparatus includes a memory and a processor. The processor is coupled to the memory and configured to process a self-heating effect model for characterizing a heat flow network of devices. The devices include a device under test and one or more adjacent devices surrounding the device under test. The self-heating effect model includes a reference thermal resistance and a reference thermal capacity; a thermal temperature feedback model used to acquire a thermal level of the device under test; a thermal resistance modification model used to acquire a modified thermal resistance of the device under test according to the thermal level of the device under test and the reference thermal resistance; and a thermal capacity modification model used to acquire a modified thermal capacity of the device under test according to the thermal level of the device under test and the reference thermal capacity.

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Shanghai, China

Sen Sheng Li