Globalfoundries Singapore Pte. Ltd.

Sen Mei

Fan Zhang

Kin Leong Pey

Pinghui Li

Laiqiang Luo

Fangxin Deng

Zhiqiang Teo

Haiqing Zhou

Xingyu Chen

A method of forming a uniform WL over the MCEL region and resulting device are provided. Embodiments include providing a substrate having a MCEL region, a HV region and a logic region, separated by an isolation region; forming a plurality of CG stacks over the MCEL region, and a plurality of CG dummy stacks over the HV region and the logic region, respectively; forming first and second overlying polysilicon layers with a spacer therebetween, an EG and a WL on the MCEL region formed; planarizing the second polysilicon layer down to upper surface of the plurality of CG stacks and the plurality of CG dummy stacks; and removing portions of the second polysilicon layer in-between the plurality of CG stacks and around the plurality of CG dummy stacks.

Control gate dummy for word line uniformity and method for producing the same

Growing community of inventors

Singapore, Singapore

Sen Mei