Kabushiki Kaisha Toshiba

Seizo Doi

Hideki Kobayashi

Akinori Hongu

Kazuhito Haruki

Iwao Higashikawa

Shiro Takeno

Mitsuo Koike

Shigeru Kanbayashi

Disclosed is a computer-aided product designing assistant apparatus and method for assisting designing of an environmentally conscious product by presenting at least one design guideline to be adopted in designing the environmental counscious product. The apparatus comprises: a database storing a plurality of design guidelines for each product and evaluation values assigned to each design guideline in relation to a plurality of environmental issues and a plurality of phases defining a life cycle of products, the evaluation values assigned to each design guideline being capable of indicating an effectiveness of each design guideline in resolving each environmental issue at each phase of the life cycle, each environmental issue respectively representing an issue to be resolved in order to reduce environmental load due to each product; and a processing unit for determining a relative importance level of each environmental issue at each phase of the life cycle for a product to be designed, selecting at least one design guideline for the product to be designed from said plurality of design guidelines stored in the database according to the evaluation values stored in the database and the relative importance level of each environmental issue at each phase of the life cycle determined for the product to be designed, and presenting said at least one design guideline selected for the product to be designed.

Computer-aided designing assistant apparatus and method of assisting designing of environmentally conscious product

Disclosed is a computer-aided product designing assistant apparatus and method for assisting designing of an environmentally conscious product by presenting at least one design guideline to be adopted in designing the environmental conscious product. The apparatus includes: a database storing a plurality of design guidelines for each product and evaluation values assigned to each design guideline in relation to a plurality of environmental issues and a plurality of phases defining a life cycle of products, the evaluation values assigned to each design guideline being capable of indicating an effectiveness of each design guideline in resolving each environmental issue at each phase of the life cycle, each environmental issue respectively representing an issue to be resolved in order to reduce environmental load due to each product; and a processing unit for determining a relative importance level a, of each environmental issue at each phase of the life cycle for a product to be designed, selecting at least one design guideline for the product to be designed from said plurality of design guidelines stored in the database according to the evaluation values stored in the database and the relative importance level of each environmental issue at each phase of the life cycle determined for the product to be designed, and presenting said at least one design guideline selected for the product to be designed.

An electron-beam lithography system employing an 'electron holography' technique is disclosed. The system at least comprises: a shaping aperture for shaping an electron beam emitted from an electron-beam source so as to have a specific beam shape; at least two single crystal thin films for diffracting the electron beam passed through this shaping aperture; focusing means for respectively focusing the incident electron beam passed through these single crystal thin films and the diffracted electron beams diffracted by these single crystal thin films; and a select aperture for selecting only the desired diffracted electron beams. The transmitted incident electron beam interferes with the diffracted electron beams, whereby a stripe pattern having a desired nanometer-order pitch is formed on a resist surface coated onto a semiconductor substrate or a mask blank.

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Tokyo, Japan

Seizo Doi