Ibiden Company Limited

Seiko Okuda

Fumishige Miyata

Tatsuya Koyama

This invention has as its object to provide a ceramic heater provided at low cost without being compromised in its performance, with the result that a ceramic heater equivalent to the conventional product in performance characteristics can be manufactured at reduced cost. A ceramic heater comprising a core, an insulation sheet covering the core and a resistance heating element of high-melting metal embedded between the core and insulation sheet, a high-temperature part of the resistance heating element, the operating temperature of which reaches 300&deg; C. or higher, comprises a high-melting metal supplemented with Re or Mo.

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Gifu, Japan

Seiko Okuda