Taiwan Semiconductor Manufacturing Comp. Ltd.

Seiji Takahashi

Jhy-Jyi Sze

Dun-Nian Yaung

Chen-Jong Wang

Yimin Huang

Jen-Cheng Liu

Feng-Chi Hung

Chun-Wei Chang

Feng-Jia Shiu

Wei Chuang Wu

Wei-Cheng Hsu

Tzu-Hsiang Chen

Kuo-Yu Chou

Calvin Yi-Ping Chao

Shang-Fu Yeh

Chih-Lin Lee

Chin Yin

Alexander Kalnitsky

Yuichiro Yamashita

Tzu-Jui Wang

Jung-I Lin

Shen-Hui Hong

King Liao

The present disclosure relates to a CMOS image sensor. The image sensor comprises a pixel region comprising a photodiode disposed within a substrate. A deep trench isolation (DTI) ring encloses the photodiode from top view and extends from a back-side to a first position within the substrate from cross-sectional view. A pair of shallow trench isolation (STI) structures is respectively disposed at an inner periphery and an outer periphery sandwiching the DTI ring from top view and extends from a front-side to a second position within the substrate from cross-sectional view. A pixel device is disposed at the front-side of the substrate directly overlying the DTI ring. The pixel device comprises a gate electrode disposed over the substrate and a pair of source/drain (S/D) regions disposed within the substrate and reaching on a top surface of the DTI ring.

Pixel device on deep trench isolation (DTI) structure for image sensor

Various embodiments of the present disclosure are directed towards an image sensor. The image sensor includes a first semiconductor substrate having a photodetector and a floating diffusion node. A transfer gate is disposed over the first semiconductor substrate, where the transfer gate is at least partially disposed between opposite sides of the photodetector. A second semiconductor substrate is vertically spaced from the first semiconductor substrate, where the second semiconductor substrate comprises a first surface and a second surface opposite the first surface. A readout transistor is disposed on the second semiconductor substrate, where the second surface is disposed between the transfer gate and a gate of the readout transistor. A first conductive contact is electrically coupled to the transfer gate and extending vertically from the transfer gate through both the first surface and the second surface.

Low-noise image sensor having stacked semiconductor substrates

Various embodiments of the present disclosure are directed towards a method for forming a pixel sensor. The method comprises forming a photodetector in a substrate. The substrate is patterned to define an opening above the photodetector. A gate electrode is formed within the opening, where the gate electrode has a top conductive body overlying a bottom conductive body. A first segment of a sidewall of the top conductive body contacts the bottom conductive body. A floating diffusion node is formed in the substrate laterally adjacent to the gate electrode. A second segment of the sidewall of the top conductive body overlies the floating diffusion node.

Low noise vertical gate device structure

In some embodiments, the present disclosure relates to method for forming an image sensor integrated chip. The method includes forming a first photodetector region in a substrate and forming a second photodetector region in the substrate. A floating diffusion node is formed in the substrate between the first photodetector region and the second photodetector region. A pick-up well contact region is formed in the substrate. A first line intersects the floating diffusion node and the pick-up well contact region. One or more transistor gates are formed on the substrate. A second line that is perpendicular to the first line intersects the pick-up well contact region and the one or more transistor gates.

Semiconductor imaging device having improved dark current performance

Various embodiments of the present disclosure are directed towards a method for forming an image sensor, the method includes forming a first photodetector and a second photodetector in a substrate. An isolation structure is formed in the substrate between the first photodetector and the second photodetector. A readout transistor is formed over the isolation structure. The readout transistor includes a first sidewall directly over the first photodetector and a second sidewall directly over the second photodetector. A height of the readout transistor from the first sidewall to the second sidewall is constant.

Pixel device layout to reduce pixel noise

A semiconductor device includes a source/drain diffusion area, a first doped region and a gate. The source/drain diffusion area, defined between a first isolation structure and a second isolation structure, includes a source region, a drain region and a device channel. The first doped region, disposed along a first junction between the device channel and the first isolation structure, is separated from at least one of the source region and the drain region. The first doped region has a dopant concentration higher than that of the device channel. The gate is disposed over the source/drain diffusion area. The first doped region is located within a projected area of the gate onto the source/drain diffusion area, the first isolation structure and the second isolation structure. A length of the first doped region is shorter than a length of the gate in a direction from the source region to the drain region.

Semiconductor device with low random telegraph signal noise

In some embodiments, a pixel sensor is provided. The pixel sensor includes a first photodetector arranged in a semiconductor substrate. A second photodetector is arranged in the semiconductor substrate, where a first substantially straight line axis intersects a center point of the first photodetector and a center point of the second photodetector. A floating diffusion node is arranged in the semiconductor substrate at a point that is a substantially equal distance from the first photodetector and the second photodetector. A pick-up well contact region is arranged in the semiconductor substrate, where a second substantially straight line axis that is substantially perpendicular to the first substantially straight line axis intersects a center point of the floating diffusion node and a center point of the pick-up well contact region.

Various embodiments of the present disclosure are directed towards an image sensor including a plurality of photodetectors within a substrate. A first plurality of semiconductor devices disposed over a first side of the substrate. A second plurality of semiconductor devices disposed over the first side of the substrate. The first and second plurality of semiconductor devices are disposed on opposing sides of the plurality of photodetectors such that the plurality of photodetectors are spaced laterally between the first and second plurality of semiconductor devices. The first and second plurality of semiconductor devices are laterally offset from the plurality of photodetectors.

Imaging device with uniform photosensitive region array

Various embodiments of the present disclosure are directed towards an image sensor including a first photodetector and a second photodetector each disposed within a semiconductor substrate. An isolation structure extends from a front-side surface of the semiconductor substrate to a back-side surface of the semiconductor substrate. The front-side surface is opposite the back-side surface and the isolation structure is laterally between the first and second photodetectors. A readout transistor is disposed on the front-side surface of the semiconductor substrate. A first side of the readout transistor overlies the first photodetector and a second side of the readout transistor overlies the second photodetector. The first side is opposite the second side and the readout transistor continuously extends over the isolation structure.

The present disclosure relates to a CMOS image sensor having a pixel device on a deep trench isolation (DTI) structure, and an associated method of formation. In some embodiments, the DTI structure is disposed at a peripheral of a pixel region, extending from a back-side of the substrate to a position within the substrate. A pixel device is disposed at the front-side of the substrate directly overlying the DTI structure. The pixel device comprises a pair of source/drain regions disposed within the substrate and reaching on a top surface of the DTI structure. A second trench isolation structure is disposed from the front-side at an inner peripheral of the first trench isolation structure. The first trench isolation structure has a top surfaces locating at a position of the substrate vertically exceeding bottom surfaces of the second trench isolation structure.

An image sensor semiconductor device includes a first photodiode disposed in a semiconductor substrate and configured to generate charges in response to radiation, a first transistor disposed adjacent to the first photodiode, a floating diffusion region configured to store the generated charges, a reset transistor configured to reset the floating diffusion region, and a second transistor disposed over the substrate between the first photodiode and the reset transistor. The first transistor and the second transistor are configured to generate a first electric field and a second electric field, respectively, to move the charges generated by the first photodiode to the floating diffusion region.

Semiconductor structure and operating method for improving charge transfer of image sensor device

The present disclosure relates to a CMOS image sensor having a doped isolation structure separating a photodiode and a pixel device, and an associated method of formation. In some embodiments, the CMOS image sensor has a doped isolation structure separating a photodiode and a pixel device. The photodiode is arranged within the substrate away from a front-side of the substrate. A pixel device is disposed at the front-side of the substrate overlying the photodiode and is separated from the photodiode by the doped isolation structure. Comparing to previous image sensor designs, where an upper portion of the photodiode is commonly arranged at a top surface of a front-side of the substrate, now the photodiode is arranged away from the top surface and leaves more room for pixel devices. Thus, a larger pixel device can be arranged in the sensing pixel, and short channel effect and noise level can be improved.

High density image sensor

The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip includes a dielectric structure disposed over a substrate. A plurality of conductive interconnect layers are disposed within the dielectric structure. The plurality of conductive interconnect layers include alternating layers of interconnect wires and interconnect vias. A metal-insulating-metal (MIM) capacitor is arranged within the dielectric structure. The MIM capacitor has a lower conductive electrode separated from an upper conductive electrode by a capacitor dielectric structure. The MIM capacitor vertically extends past two or more of the plurality of conductive interconnect layers.

Growing community of inventors

Hsinchu, Taiwan

Seiji Takahashi