Tokyo Electron Limited

Seiji Nakano

Katsuhiro Morikawa

Naruaki Iida

Suguru Enokida

Ikuo Sunaka

Yoshihiro Kawaguchi

Kazunori Kuratomi

Yohei Yamawaki

Toshio Shimazu

Masatoshi Kaneda

Hayato Tanoue

Michiaki Matsushita

Takeshi Tamura

Hirotoshi Mori

Tsuyoshi Watanabe

Munehisa Kodama

Mitsuteru Yano

Junnosuke Maki

Yasunori Toyoda

Hiroki Harada

A separating apparatus configured to separate a processing target object into a first separation body and a second separation body includes a first holder configured to hold the first separation body; a second holder configured to hold the second separation body; a moving unit configured to move the first holder and the second holder relatively to each other; and a separation surface cleaning unit configured to clean at least a separation surface of the first separation body or a separation surface of the second separation body.

Separating apparatus and separating method

A substrate processing apparatus configured to process a substrate includes a substrate holder configured to hold, in a combined substrate in which a first substrate and a second substrate are bonded to each other, the second substrate; a periphery removing unit configured to remove, starting from a periphery modification layer formed on the first substrate along a boundary between a peripheral portion to be removed and a central portion of the first substrate, the peripheral portion from the combined substrate held by the substrate holder; and a collection unit equipped with a collection mechanism configured to collect the peripheral portion removed by the periphery removing unit.

Substrate processing apparatus and substrate processing method

A transfer device, configured to hold a substrate to be thinned and configured to be moved along a transfer path through which the substrate is transferred, includes a grip member configured to hold a frame to which the substrate is mounted with a tape therebetween; a guide member configured to be moved along the transfer path together with the grip member and configured to place thereon the frame held by the grip member; and a moving mechanism configured to move the grip member with respect to the guide member to move the frame held by the grip member along the guide member.

Transfer device, substrate processing system, transfer method and substrate processing method

An apparatus includes first load portsA andB and second load portsC andD provided in a left-right direction; a processing unit D; an inspection moduleprovided between the first load portsA andB and the second load portsC andD; a first substrate transfer mechanismA provided at one side of the inspection modulein the left-right direction, and configured to transfer a substrate W into the processing unit Dand a transfer container C on the first load portsA andB; a second substrate transfer mechanismB provided at the other side thereof, and configured to transfer the substrate W into the inspection moduleand a transfer container C on the second load portsC andD; and a transit unitfor transferring the substrate W between the first and the second substrate transfer mechanismsA andB.

Substrate processing apparatus, substrate processing method and recording medium

An apparatus includes first load portsA andB and second load portsC andD provided in a left-right direction; a processing unit Dan inspection moduleprovided between the first load portsA andB and the second load portsC andD; a first substrate transfer mechanismA provided at one side of the inspection modulein the left-right direction, and configured to transfer a substrate W into the processing unit Dand a transfer container C on the first load portsA andB; a second substrate transfer mechanismB provided at the other side thereof, and configured to transfer the substrate W into the inspection moduleand a transfer container C on the second load portsC andD; and a transit unitfor transferring the substrate W between the first and the second substrate transfer mechanismsA andB.

A substrate transfer method is provided. The substrate transfer method comprises: loading the transfer container to a load port, and separating the cover body from the container main body; detecting an accommodation status of the substrate in the container main body by a detection unit; correcting, by a correction device, the accommodation status of the substrate in the container main body in which the accommodation status of the substrate detected by the detection unit is abnormal; and allowing a substrate transfer device to enter the container main body in which the accommodation status of the substrate is corrected, and unloading the substrate from the container main body.

Substrate transfer method and storage medium

A substrate transfer apparatus unloads a substrate from a transfer container in which a cover body airtightly closes a substrate unloading opening formed at a front surface of a container main body and multiple substrates are accommodated in the form of shelves. The substrate transfer apparatus includes a load port to which the transfer container is loaded; a detection unit configured to detect an accommodation status of the substrate in the container main body that is loaded to the load port and separated from the cover body; a substrate transfer device configured to enter the container main body and unload the substrate; and a correction device configured to correct the accommodation status of the substrate in the container main body before the substrate is unloaded from the container main body by the substrate transfer device when the detection unit detects abnormality in the accommodation status.

Substrate transfer apparatus, substrate transfer method, and storage medium

A transfer apparatus for mounting and transferring a transferred component on a driven means, the transfer apparatus includes: a driving means for rotating a driving side pulley by a rotational driving force of a motor to move a belt wound around the driving side pulley, thereby moving the driven means coupled to the belt in a predetermined direction; and a transfer monitoring means for monitoring a transfer state of the driven means, wherein the transfer monitoring means detects a torque value of the motor required to move the driven means, calculates a torque differential value of the torque value with respect to time based on the detected torque value, and detects the transfer state using the calculated torque differential value.

Transfer apparatus and transfer method

A substrate support device including a support member having a lower-surface support section to support a lower surface of a substrate; and a position restriction section provided on the lower-surface support section, the position restriction section being formed to surround a periphery of the substrate supported on the lower-surface support section and restrict a position of the substrate. At least one of the lower-surface support section and the position restriction section includes a base material and a protective film formed to cover the base material and prevent at least one of wear and chemical erosion to which the base material will be subject. The substrate support device further includes, for example, a base that supports the support member, and a driving structure that moves the support member in a relative fashion with respect to the base, and is constructed as a substrate transport device.

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Koshi, Japan

Seiji Nakano