Hirata Corporation

Mitsubishi Jidosha Kogyo Kabushiki Kaisha

Mitsubishi Jidosha Engineering Kabushiki Kaisha

Mitsubishi Jidosha Kogyo K.k.

Seiji Matsuda

Hirofumi Higashi

Kinya Kagami

Akihiro Fujimoto

Jun Hoshikawa

Tetsunori Otaguro

Noritsugu Ohsawa

Akira Mikita

Kazushi Miyamoto

Kiminari Kato

A load port includes a first pin projecting on a dock plate and provided on the dock plate so as to be pushed down, and a first detection unit provided on the base portion and configured to detect that the dock plate is located at a first position. The first detection unit includes a movable member capable of displacing in a moving direction of the dock plate, and a first sensor configured to detect the displacement of the movable member. The movable member is arranged at a position to abut against the first pin that is in a pushed down state in a process in which the dock plate moves from a second position to the first position.

Load port with non-contact sensor

Load port having movable member that abuts a pin

A variable compression ratio device for an internal combustion engine includes: a connecting rod, having a small end and a large end, wherein a support hole formed at the small end is pivotally supported by a support shaft of a piston that reciprocates in a cylinder, and a support hole formed at the large end is pivotally supported by a support shaft of a crankshaft; an eccentric sleeve that is rotatably installed between the support hole of the small end or the support hole of the large end and the support shaft, and displaces a center axis of the support hole of the small end or a center axis of the support hole of the large end with respect to a center axis the support shaft; and an actuator that drives and rotates the eccentric sleeve.

Variable compression ratio device for internal combustion engine

This invention provides a piston in which the moving piston unit can be prevented from rotating with respect the base piston unit, while suppressing the increase of the sliding resistance the piston has with respect to the cylinder. The circumferential wall of the moving piston unit has a pair of skirt parts opposing each other across a piston boss and a pair of side-wall parts coupling the skirt parts and each having an outer circumferential surface concaved toward the central axis Xof the piston. The side-wall parts have a penetration part each, which penetrates the side-wall part and extends in the directions the moving piston unit reciprocates with respect to the base piston unit. The base piston unit has rotation preventing projections that project perpendicular to the central axis of the piston and are inserted into the penetration parts.

Piston

The present invention provides a substrate aligning system which prevents particles or the like from attaching to a substrate such as a wafer used in the semiconductor manufacturing process, and adjusts the orientation of the substrate accurately within a short period of time. According to a substrate aligning system (A) as a preferred embodiment of the present invention, a plurality of rollers () push the peripheral portion of a wafer (W) from different directions to align the center of the wafer. While the center of the wafer is kept aligned by the rollers (), the contacting portion () of a contacting member () contacts a chip (Wa) of the wafer (W). The contacting member () is then moved arcuately to rotate the wafer (W), thus adjusting the orientation of the wafer.

Substrate aligning system

Growing community of inventors

Tokyo, Japan

Seiji Matsuda