Ebara Corporation

Seiji Kashiwagi

Toyoji Shinohara

Toshiharu Nakazawa

Tetsuro Sugiura

Kohtaro Kawamura

Yasuhiko Suzuki

Keiichi Ishikawa

Takashi Kyotani

Hideo Arai

Kazutomo Miyazaki

Tetsuo Komai

Hiroshi Ikeda

Kotaro Kawamura

Kazumasa Hosotani

Takeshi Eda

A burner head that constitutes a combustion chamber for an exhaust gas processing apparatus by being attached to an upper portion of a combustion chamber main body is provided. The burner head includes a chassis which has a cylindrical portion having a lower opening and in which a fastening module for removably fastening to the combustion chamber main body is provided, a fuel nozzle that blows fuel into the cylindrical portion, a combustion supporting gas nozzle that blows combustion supporting gas into the cylindrical portion, a processing gas nozzle that blows processing gas into the cylindrical portion, and a pilot burner that ignites the fuel and/or the combustion supporting gas.

Burner head for exhaust gas processing apparatus, manufacturing method of the same, combustion chamber for exhaust gas processing apparatus, and manufacturing method and maintenance method of the same

A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which one or more abatement parts for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless are attached. The one or more abatement parts are selected, depending on the amount and kind of the exhaust gas discharged from the vacuum pump, from plural kinds of abatement parts which have different treatment types of exhaust gas and/or different treatment amounts of exhaust gas.

Vacuum pump with abatement function

An exhaust gas treatment apparatus for treating an exhaust gas discharged from an EUV (Extreme Ultra Violet) exposure equipment by combustion treatment to make the exhaust gas harmless is disclosed. The exhaust gas treatment apparatus includes a cylindrical combustion chamber configured to combust a processing gas containing hydrogen, and a processing gas nozzle and an oxidizing gas nozzle provided on the combustion chamber and configured to blow the processing gas and an oxidizing gas, respectively, in a tangential direction to an inner circumferential surface of the combustion chamber, wherein the processing gas nozzle and the oxidizing gas nozzle are positioned in the same plane perpendicular to an axis of the combustion chamber.

Exhaust gas treatment apparatus

A hybrid stepping motor has a connector housing formed integrally with an insulator having an upper insulator and a lower insulator. The hybrid stepping motor includes a stator core and output terminals concentrically disposed outside the stator core. A wiring pattern serving as the output terminals has connector pins and land portions disposed eccentrically with respect to one another. The land portions are formed on an outer edge side of the wiring pattern. A surface, which is an uppermost surface of the wiring pattern, is located below a lowermost surface, in which jumper wires and lead wires pass, of the lower insulator. The lead wires are pulled out from a lower side, and are pulled out to guiding grooves.

A combustion-type exhaust gas treatment apparatus has a combustion treatment chamber for treating exhaust gas by combusting and decomposing the exhaust gas, a main burner for forming a flame in the combustion treatment chamber by supplying a mixture gas produced by premixing a fuel gas and an oxidizing gas, and a scraper for scraping off solid matters adhering to an inner wall of the combustion treatment chamber. The mixture gas is adjusted within combustion range and supplied to the main burner during treatment for treating the exhaust gas by combusting and decomposing the exhaust gas when the scraper is not in operation, and the mixture gas is adjusted outside combustion range and supplied to the main burner during treatment for treating the exhaust gas by combusting and decomposing the exhaust gas when the scraper is in scraping operation.

Combustion-type exhaust gas treatment apparatus

A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which at least one abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless is attached. The abatement part is selected from a plurality of abatement parts having different treatment types of exhaust gas and/or different treatment amounts of exhaust gas and/or different treatment performances of exhaust gas.

A vacuum pump includes a vacuum pump having a discharge port to which an abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless is attached. The vacuum pump includes a cylindrical member having an exhaust gas introduction port for introducing the exhaust gas to be treated and a gas outlet port for discharging gases which have been treated, a plurality of fuel nozzles provided at a circumferential wall of the cylindrical member for ejecting a fuel, and a plurality of air nozzles provided at the circumferential wall of the cylindrical member for ejecting air so as to form a swirling flow of air along an inner circumferential surface of the circumferential wall. The air nozzles are disposed at a plurality of stages spaced in an axial direction of the cylindrical member.

A vacuum pump has a discharge port coupled to an abatement chamber for treating an exhaust gas discharged from a chamber of a manufacturing apparatus to make the exhaust gas harmless. The vacuum pump is coupled to a heat exchanger configured to heat an inert gas by using heat generated when the exhaust gas is treated to be made harmless in the abatement part. The inert gas heated by the heat exchanger is introduced into the vacuum pump.

Growing community of inventors

Tokyo, Japan

Seiji Kashiwagi