Rigaku Corporation

Seiji Fujimura

Yu Aoki

Tatsuya Inoue

Hiroaki Kita

A measurement system obtains its own measurement result through use of a different system's measurement result obtained by a different measurement system. The measurement system includes: an output data acquisition unit, a designated position acquisition unit configured to acquire a designated position, which is a position indicating an address at which the different system's measurement result is represented in the output data, by a user's designation, a different system's measurement result acquisition unit, a measurement result acquisition unit, and a position data storage unit configured to store position data indicating the designated position. The different system's measurement result acquisition unit acquires, when the position data is already stored in the position data storage unit in a case where the output data acquisition unit acquires different output data obtained by the different measurement system, the different system's measurement result included at the designated position indicated by the position data.

Measurement system, program, and measurement system control method

A simultaneous multi-elements analysis type X-ray fluorescence spectrometer according to the present invention includes: a sample table () on which a sample () is placed and a conveyance arm () for the sample (). The sample table () has a cutout () formed therein, through which the conveyance arm () is allowed to pass in a vertical direction. Regarding respective measurement points (Pn) on a blank wafer (1), a background correction unit () previously stores, as background intensities at the measurement points (Pn), intensities obtained by subtracting a measured intensity at a reference measurement point (P) located above the cutout () from each of measured intensities at the measurement points (Pn), and regarding respective measurement points (Pn) on an analytical sample (1), the background correction unit () subtracts the background intensities at the measurement points (Pn) from measured intensities at the measurement points (Pn), thereby correcting background.

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Takatsuki, Japan

Seiji Fujimura