Rigaku Corporation

Seiitsu Kurita

Hiroaki Kita

Provided is a fluorescent X-ray analysis apparatus, including: a collecting portion configured to drop a liquid droplet onto a substrate having an object to be measured on a surface thereof and move the dropped liquid droplet on the surface of the substrate to collect the object to be measured into the liquid droplet; a drying portion configured to dry the liquid droplet so that the object to be measured is held onto the surface of the substrate; an analysis portion configured to irradiate the object to be measured with an X-ray and perform quantitative analysis of an element contained in the object to be measured based on a fluorescent X-ray output from the object to be measured; a beam sensor configured to emit a laser having a band shape for detecting an amount of the liquid droplet separated from the collecting portion before the liquid droplet is dried after the object to be measured is collected; and a calculating portion configured to calculate a correction coefficient for correcting the amount of the liquid droplet or a quantitative analysis value of the object to be measured based on a detection result of the beam sensor.

Sample collecting device, sample collecting method, and fluorescent x-ray analysis apparatus using the same

An X-ray fluorescence spectrometric system includes: a job execution unit configured to execute a job; a storage unit configured to store in advance a time required for each of operations in association with the each of the operations; a calculation unit configured to calculate, when the job is generated, a time to be taken until execution of the job is completed, for each job based on the time stored in the storage unit; and a control unit configured to newly store, when the job is executed, a time taken for the operation in the storage unit in association with the operation. The calculation unit is configured to further calculate, when the job is executed, the time to be taken until the execution of the job is completed, based on the time newly stored in the storage unit.

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Amagasaki, Japan

Seiitsu Kurita