Yamatake Corporation

Azbil Corporation

Seiichiro Kinugasa

Atsushi Kato

Shunji Ichida

Hideyuki Tanaka

Yoshiyuki Ishikura

Shinichi Ike

Keiji Miyazawa

Shoji Kamiunten

Takaaki Kuroiwa

A particle detecting device includes a chamber; a first introduction flow pathfor introducing a particle-containing fluid into the chamber; a second introduction flow pathfor introducing a particle-free fluid into the chamber; a light sourceconfigured to illuminate fluid in the chamberto detect particles contained in the fluid; a discharge flow pathfor discharging fluid from the chamber; an introduction flow meterconfigured to measure a flow rate of fluid flowing through the second introduction flow path; and a control unitconfigured to perform control such that a fluid having a total flow rate obtained by adding a predetermined flow rate of fluid flowing through the first introduction flow pathto a flow rate of fluid flowing through the second introduction flow path, the flow rate being measured by the introduction flow meter, flows through the discharge flow path

Particle detecting device and control method for the particle detecting device

A particle detecting device includes: a light source that illuminates, with an excitation beam, a fluid that contains a plurality of particles; a fluorescence measuring instrument that measures fluorescence that is produced in a region that is illuminated by the excitation beam; a scattered light measuring instrument that measures scattered light that is produced in a region that is illuminated by the excitation beam; an interference status evaluating portion that evaluates whether the scattered light that is measured is producing constructive interference or producing destructive interference; and a particle counting portion that counts a plurality of particles depending on the measured interference of the measured light.

Particle detecting and differentiating device and method

A particle detecting device includes: a light source that illuminates, with an excitation beam, a fluid that contains a plurality of particles; a fluorescence measuring instrument that measures, at at least two different wavelengths, fluorescence that is produced in a region that is illuminated by the excitation beam; a scattered light measuring instrument that measures scattered light that is produced in a region that is illuminated by the excitation beam; an interference status evaluating portion that evaluates whether the scattered light that is measured is producing constructive interference or producing destructive interference; and a particle counting portion that counts a plurality of particles depending on the measured interference of the measured light, and counts fluorescent particles that are subject to detection, from among the plurality of particles, based on a wavelength of fluorescent measured.

Particle detecting device and particle detecting method

A particle detecting device includes: a fluorescence measuring instrument that measures light in a fluorescent band, which is produced in a region that is illuminated by an excitation beam from a light source; and an evaluating portion that evaluates whether the light measured by the fluorescence measuring instrument includes Raman-scattered light and florescent light, to evaluate that a fluorescent particle is included in the fluid if the evaluation is that the measured light includes florescent light, and to evaluate that the fluid does not include a fluorescent particle if the evaluation is that the measured light does not include fluorescent light, to evaluate that moisture is included in the fluid if there is an evaluation that the measured light includes Raman scattered light, and to evaluate that the fluid does not include moisture if there is an evaluation that the measured light does not include Raman scattered light.

To provide a fluorescent temperature sensor capable of identifying easily the location of a failure. A fluorescent temperature sensor for producing a temperature signal from fluorescent light from a fluorescent material and that has been optically stimulated comprises a light projecting module having an LED for projecting light at the fluorescent material and a second photodiode for receiving light emitted from the LED and a light receiving module having a first photodiode for receiving the light emitted from the fluorescent material, where the location of a failure in the sensor can be identified based on, at least, the output signal from the second photodiode.

Fluorescent temperature sensor

To provide a fluorescent temperature sensor wherein light is propagated reliably with an easy adjustment. A fluorescent temperature sensor for producing a temperature signal from fluorescent light of an optically excited fluorescent material includes: a light emitting device for projecting light to the fluorescent material; a photoreceiving element for receiving fluorescent light emitted from the fluorescent material; a case for housing both the light emitting device and the photoreceiving element; and an optical fiber, between the case and the fluorescent material, for propagating the light of both the light emitting device and the fluorescent material. The case and the optical fiber are positioned so that the light from the light emitting device is received within the optical fiber, and so that the light from the fluorescent material is incident on the photoreceiving element from within the optical fiber.

A fluorescent light temperature sensor for producing a temperature signal from a fluorescent light of an optically stimulated fluorescent material is provided with: an LED for projecting light onto the fluorescent material; a driving circuit for driving the light projecting element; a photo diode for receiving the fluorescent light that is emitted from the fluorescent material; a signal processing circuit for producing the temperature signal from the output signal from the photo diode; and an APC circuit for controlling the driving of the driving circuit so as to maintain a uniform light projecting intensity from the LED based on the output signal of the photo diode.

Fluorescent light temperature sensor

To provide a temperature sensor probe that can take stable measurements, and a manufacturing method thereof. The temperature sensor probe related to the present invention is a temperature sensor probe for measuring temperature using a fluorescent substance that changes fluorescent characteristics depending on temperature. Then, a powdered fluorescent substance, a guide wave route member that propagates excitation light, which is irradiated on the fluorescent substance, and fluorescent light, which is produced by the fluorescent substance, are provided. Further, the particle size of the powdered fluorescent substance is confined to the range of 60 to 100 &#x3bc;m.

Temperature sensor probe

To provide a temperature sensor probe that can conduct stable measurements, and the manufacturing method of the same. The temperature sensor probe related to the present invention provides: a fluorescent material that is a mixture of a fluorescent substance and a transparent material; a thermosensitive part having a concave part in which the fluorescent material is arranged; a waveguide route rod that propagates excitation light, which is irradiated on the fluorescent material, and fluorescent light, which is produced by the fluorescent substance; and a protective tube that covers the side surfaces of the waveguide route rod. Then, the fluorescent material is affixed to the tip of the waveguide route rod using the transparent material, and the waveguide route rod bites into the fluorescent material.

Temperature sensor probe and manufacturing method of the same

A temperature sensor for measuring temperature in accordance with a time-of-life of a fluorescent light that is produced by a fluorescent material, and is provided with a light source for imaging an excitation light, a fluorescent material for producing fluorescent light by the excitation light, a photoreceptor element for detecting the fluorescent light and outputting a fluorescent light signal in accordance with the fluorescent light intensity, and a signal processing circuit for calculating a temperature based on the fluorescent light signal from the photoreceptor element, where the signal processing circuit calculates integral values for the fluorescent light signals in the respective intervals A through C that have identical time durations, and then, based on the integral values, for two intervals, calculates a difference value, and then calculates a ratio of two difference values, to be a variable that varies in accordance with the temperature, and then references the relationship between the temperature and the ratio between difference values, stored in advance, to convert the calculated variable into the temperature.

Temperature sensor and temperature measuring method

A differential pressure measuring system includes a light source for emitting a light, a first transducer for attenuating the intensity of the emitted light in a first range, depending on a first pressure, and providing a first light, a second transducer for attenuating the intensity of the first light in a second range, depending on a second pressure, and providing a second light, a feedback circuit for adjusting the intensity of the emitted light to maintain the intensity of the second light in the second range constant, and a measuring module for measuring a differential pressure between the first and second pressures, based on the intensities of the second light in the first and second ranges.

Differential pressure measuring system and differential pressure measuring method

Light emitted by a light source is inputted to a sensor to generate an optical path difference on input light according to a physical parameter to be measured, light outputted with an optical path difference generated in response to the input is inputted to another sensor to generate an optical path difference on input light according to a physical parameter to be measured, and light outputted with an optical path difference generated in response to the input is split into two to generate an interference fringe. Due to the presence of light which is changed in optical path length in the first sensor, is inputted to the sensor of the subsequent stage, and is transmitted without being changed in optical path length, and light which is not changed in optical path length in the first sensor, is inputted to the sensor of the subsequent stage, and is transmitted after being changed in optical path length, an interference fringe is generated with an fringe located on a position corresponding to a difference value between physical parameters to be measured. Thus, a difference value between physical parameters is measured by detecting the position.

Physical quantity measuring method and device therefor

A flow sensor () is constituted by a substrate () having a front surface () side facing a channel () for a measurement target fluid (), and a channel forming member () and a plate () disposed oppositely across the substrate (). The substrate () is formed of stainless steel having a thickness of about 50 &#x3bc;m to 150 &#x3bc;m into a plate. An electric insulating film is formed on that surface () of the substrate () which is opposite to the channel () side, and a temperature detection sensor () for measuring the flow velocity (flow rate) of the fluid (), an ambient temperature sensor (), an electrode pad (), and a thin metal film () for wiring are formed on it.

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Tokyo, Japan

Seiichiro Kinugasa