Denki Kagaku Kogyo Kabushiki Kaisha

Adv Antest Corporation

Seiichi Sakawa

Yoshinori Terui

Hiroshi Yasuda

Takamasa Satoh

Yoshihisa Ooae

Takeshi Haraguchi

Ryozo Nonogaki

Hiroshi c/o Advantest Corporation Yasuda

Yoshihisa c/o Advantest Corporation Ooae

Takeshi c/o Advantest Corporation Haraguchi

Takamasa c/o Advantest Corporation Satoh

The present invention provides an electron source that can produce a stable electron beam even if an apparatus employing the electron source receives vibration from the outside. An electron source comprising an insulator, a pair of conductive terminals attached to the insulator, a filament tensed between the pair of conductive terminals, a rod-shaped cathode having a sharp end portion performing as an electron emitting portion and joined with the filament, wherein the cathode has another end portion different from the electron emitting portion, fixed to the insulator. It is preferred that said another end portion of the cathode other than the electron emitting portion, is fixed to the insulator via a metal pin brazed with the insulator.

Electron source

An electron gun includes an electron source configured to emit electrons. The electron source includes an electron emission region configured to emit the electrons and an electron emission restrictive region configured to restrict emission of the electrons. The electron emission restrictive region is located on a side surface of the electron source except an electron emission surface on a tip of the electron source and is covered with a different material from the electron source. The electron gun emits thermal field-emitted electrons by applying an electric field to the tip while maintaining a sufficiently low temperature to avoid sublimation of a material of the electron source. The material of the electron source may be lanthanum hexaboride (LaB) or cerium hexaboride (CeB). The electron emission restrictive region may be covered with carbon.

Electron gun, electron beam exposure apparatus, and exposure method

An electron source excellent in the uniformity in current emission distribution is provided certainly and at a low cost. A process for producing an electron source having an electron emitting portion at one end of a rod, which comprises a step of forming the electron emitting portion by machining, and a step of removing a damaged layer at the surface of the formed electron emitting portion by chemical polishing or electrolytic polishing.

Electron source manufacturing method

An S/N ratio of a probe current is measured while a filament current is changed, and the filament current in which the S/N ratio is maximal is determined.

METHOD FOR DETERMINING AN OPERATIONAL CONDITION OF A THERMAL FIELD ELECTRON EMITTER, A METHOD FOR OPERATING THE THERMAL FIELD ELECTRON EMITTER AND AN ELECTRON BEAM UTILIZING SYSTEM HAVING THE THERMAL FIELD ELECTRON EMITTER

Growing community of inventors

Shibukawa, Japan

Seiichi Sakawa