Semiconductor Energy Laboratory Co., Ltd.

Seiichi Odaka

Shunpei Yamazaki

Toshimitsu Konuma

Toshio Watanabe

Masahiko Sato

Hiroyuki Sakayori

Ippei Kobayashi

Toshiharu Yamaguchi

Akio Osabe

Osamu Aoyagi

Kaoru Tabata

Chizuru Isigaki

Shigenori Hayashi

Naoki Hirose

Toru Takayama

Kenji Itoh

Takashi Inujima

Kazuo Urata

Mamoru Tashiro

Shinji Imato

Takashi Inuzima

Yuji Tanamura

An improved liquid crystal device and manufacturing method for same are described. In the device, a pair of substrates, between which a liquid crystal layer is disposed, is joined with pillars inbetween functioning as spacers which are provided of photocurable resin by photolithography. With this stucture, the spacers can be in surface contact with the inside surfaces of the substrates on which electrode arrangement and active devices are formed.

Liquid crystal device having sealant and spacers made from the same

An improved liquid crystal device and manufacturing method for same are described. In the device, a pair of substrates, between which a liquid crystal layer is disposed, is joined with pillars inbetween functioning as spacers which are provided of photocurable resin by photolithography. With this structure, the spacers can be in surface contact with the inside surfaces of the substrates on which electrode arrangement and active devices are formed.

Liquid crystal device and method for manufacturing same with spacers

An improved liquid crystal device and manufacturing method for same are described. In the device, a pair of substrates, between which a liquid crystal layer is disposed, is joined with pillars inbetween functioning as spacers which are provided of photocurable resin by photolithography. With this structure, the spacers can be in surface contact with the inside surfaces of :he substrates on which electrode arrangement and active devices are formed.

An improved CVD apparatus for depositing a uniform film is shown. The apparatus comprises a reaction chamber, a substrate holder and a plurality of light source for photo CVD or a pair of electrode for plasma CVD. The substrate holder is a cylindrical cart which is encircled by the light sources, and which is rotated around its axis by a driving device. With this configuration, the substrates mounted on the cart and the surroundings can be energized by light or plasma evenly throughout the surfaces to be coated.

Method of depositing films using photo-CVD with chamber plasma cleaning

A mercury-vapor lamp is provided with a reservoir in which a superfluous amount of mercury is stored in the form of liquid state. The liquid mercury in the reservoir is cooled to a certain temperature. The pressure of mercury-vapor is automatically reduced to the saturated pressure of the liquid mercury cooled. In this configuration, the pressure of mercury-vapor is controlled by adjusting the temperature of the liquid mercury stored in the reservoir.

Gas discharge lamp having temperature controlled, liquid reservoir for

Method for manufacturing liquid crystal device with spacers formed by

Growing community of inventors

Kisakata-machi, Japan

Seiichi Odaka