Coorstek Kk

Seiichi Fukuoka

Hiroki Watanabe

A silicon carbide porous body includes a skeletal structure formed by a plurality of silicon carbide particles bonded to each other, a plurality of pores formed by the skeletal structure, neck parts formed by surface-contacting of adjacent silicon carbide particles, and an average pore size is larger than 3 &#x3bc;m and equal to or smaller than 9 &#x3bc;m, and a porosity ranges from 35% to 55%. A break filter using the silicon carbide porous body enables high performance of collection of particles, prevention of soaring up of particles, and shortening of a restoration time from the depressurized state of the chamber to the atmospheric state.

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Hadano, Japan

Seiichi Fukuoka