Asml Netherlands B.v.

Seerwan Saeed

Erik Henricus Egidius Catharina Eummelen

Giovanni Luca Gattobigio

Ferdy Migchelbrink

Gheorghe Tanasa

Jimmy Matheus Wilhelmus Van De Winkel

Arnoldus Johannes Martinus Jozeph Ras

Miao Yu

Daan Daniel Johannes Antonius Van Sommeren

Jeroen Arnoldus Leonardus Johannes Raaymakers

Harold Sebastiaan Buddenberg

Floor Lodewijk Keukens

Petrus Martinus Gerardus Johannes Arts

Marijn Wouters

An inspection substrate for inspecting a component, such as a liquid confinement system, of an apparatus for processing production substrates is discussed. The inspection substrate includes a body having dimensions similar to a production substrate so that the inspection substrate is compatible with the apparatus, an illumination device, such as light emitting diodes, embedded in the body, a sensor, such as an imaging device or a pressure sensor, that is embedded in the body and configured to generate inspection information, such as image data, relating to a parameter of the component of the apparatus proximate to the inspection substrate, and a storage device embedded in the body and configured to store the inspection information.

Inspection substrate and an inspection method

Growing community of inventors

Veldhoven, Netherlands

Seerwan Saeed