International Business Machines Corporation

See Ark Chan

Arnold Reisman

Melvin Berkenblit

Takeshi Takamori

William A Brady

Rolf G Meinert

Julius J Perlini

Stanley Zirinsky

Norbert Freisitzer

Joan B Landermann

Mario G Tavares

Prakash Nahata

Douglas A West

A dry film photoresist laminator includes a punch and die assembly 24 which punches a rolled sheet dry film photoresist material 14, that is comprised of a dry film photoresist material 18 sandwiched between a Mylar top layer 16 and a polyolefin bottom layer 20, into photoresist decals. The photoresist decals are bonded to a tacky transport tape 40 which carries the decals to a polyolefin peeler assembly 54 that rolls a high tack tape 57 along the polyolefin layer 20 of the decal, thereby peeling it from the decal. The decal is advanced by a laminating assembly 44 which rolls the decal onto a heated wafer 72, thereby bonding the exposed photoresist material 18 to the wafer 72. Bonded wafer 72 and decal 14 are removed from the transport tape 40. A tape transport assembly 44 carrying the transport tape and decal is advanced through the various process steps.

Photo resist film application mechanism

A method for etching at least one aperture having a defined crystallographic geometry in single crystals which includes masking the crystal to protect predetermined portions thereof from being etched, and then anisotropically etching with a mixture of sulfuric acid and phosphoric acid.

Process for etching holes

A process for controlling the softening point and for providing a preselected softening point of solder glass which comprises bubbling oxygen-containing gas through a homogeneous melt of a solder glass containing copper oxide at a temperature and oxygen partial pressure predetermined to provide the desired preselected softening point of the solder glass and for a time sufficient to achieve equilibrium of the reaction Cu.sub.2 O+1/2O.sub.2 .revreaction.2CuO.

Method of controlling the softening point of solder glass

Growing community of inventors

Bronx, NY, United States of America

See Ark Chan