Commissariat &#xc0; L'&#xc9;nergie Atomique Et Aux &#xc9;nergies Alternatives

Commissariat a L'energie Atomique

California Institute of Technology

Centre National De La Recherche Scientifique

Ecole Nationale Travaux Publics De L'etat

Institut National Sciences Appliquees De Lyon

Sebastien Hentz

Laurent Duraffourg

Philippe Andreucci

Eric Colinet

Marc Sansa Perna

Eric Ollier

Michael Roukes

Philippe Robert

Jean-Marc Fedeli

Bernard Viala

Guillaume Jourdan

Thomas Ernst

Jean-Louis Pornin

Edward B Myers

Vincent Agache

Thomas Alava

Fabrice Jacquet

Charlotte Gillot

Julien Arcamone

Willy Ludurczak

Carine Marcoux

Emmanuelle Lagoutte

Sebastien Labarthe

Pierre Brianceau

Bastien Orlando

Christophe Masselon

Mickael Lee Roukes

Leopold Virot

Najib Kacem

Sebastien Baguet

Regis Dufour

Claude-Henri Lamarque

Van Nghi Nguyen

Stephane Minoret

Luca Leoncino

A sensor for sensing the concentration of at least one biological species in blood includes a support, at least one waveguide, and an optomechanical resonator hanging to the support. The optomechanical resonator is optically coupled to the waveguide. The optomechanical resonator is configured to vibrate in a volume mode and includes at least one face extending in the plane of the sensor and is configured to receive molecules of the given species. The optical resonator includes a body comprising an optical active area and an optical insulation layer deposited at least in line with the optical active area so as to confine at least partially an electromagnetic wave in the body.

Optomechanical sensor for sensing species' concentration in a liquid medium

Particle detection device comprising a support, a platform for receiving particles, four beams suspending the platform from the support, such that the platform can be made to vibrate, means for making said platform vibrate at a resonance frequency, means for detecting the displacement of the platform in a direction of displacement. Each beam has a length l, a width L and a thickness e and the platform has a dimension in the direction of displacement of the platform and in which in a device with out of plane mode l&#x2265;10&#xd7;L and the dimension of each beam in the direction of displacement of the platform is at least 10 times smaller than the dimension of the platform in the direction of displacement.

Micro or nanomechanical particle detection device

The invention is an electromechanical resonator, comprising a fixed portion and an oscillator oscillating at a resonant frequency and comprising a fluidic channel. The channel defines a fluidic circuit, can receive a fluid, and can be deformed at the resonant frequency. The resonator includes a waveguide, defining a photonic circuit, guiding a light wave between an input and an output of the waveguide and being able to be deformed at the resonant frequency. The waveguide input can be connected to a light source and the waveguide output can be connected to a photodetector able to form a signal representative of the light wave propagated by the waveguide towards the photodetector, the light wave being modulated at a frequency dependent on the resonant frequency. A variation in a mass of the fluid, inducing a variation in the resonant frequency, may be detected via the signal formed by the photodetector.

Optical and electromechanical resonator

A resonating measurement system having at least a microelectromechanical system (MEMS) and/or nanoelectromechanical system (NEMS) is provided, including an optomechanical device comprising at least one resonating element at at least one resonance frequency of fr, and at least one optical element having an optical index sensitive to displacement of the at least one resonating elementl; excitation circuitry configured to excite the at least one resonating element at at least at one operating frequency of fm; an injection device configured to inject a light beam, having an intensity modulated at frequency of f=fm+&#x394;f, in the optomechanical device; and a photodetection device configured to measure an intensity of a light beam transmitted from the optomechanical device, the intensity having at least one component at frequency of &#x394;f.

Resonating measurement system using improved resolution

A nanoelectronic system comprised of n microelectromechanical or nanoelectromechanical devices arranged on a connection support to electrically connect the n devices, each device with an interaction area, at least one mechanical anchor and a first terminal, a second terminal and a third terminal, the relative arrangement of the first, second and third terminals, the anchor area and the interaction area being identical or similar for the n sensors, the first terminal of each device being intended to recover a signal emitted by each representative device of the interaction area state. At least part of the devices are arranged in such a way that the geometric location of the first terminal of one of the adjacent devices is identical to the geometric location of the first terminal of said other adjacent device, the first terminals being coincident.

System with an increased surface density of microelectromechanical or nanoelectromechanical devices

A method is provided for detecting a perturbation with respect to an initial state, of a device including at least one resonant mechanical element exhibiting a physical parameter sensitive to a perturbation such that the said perturbation modifies the resonance frequency of the said resonant mechanical element. A device is provided for detecting a perturbation by hysteretic cycle having at least one electromechanical resonator with nonlinear behavior and means for actuation and detection of the reception signal via a transducer so as to analyze the response signal implementing the method. A mass sensor and a mass spectrometer using the device are also provided.

Method for detecting a perturbation by hysteretic cycle using a nonlinear electromechanical resonator and device using the method

An optomechanical device with mechanical elements and optical filters for actuating and/or detecting movement of the elements, including a support, and on the support: an array of mechanical elements anchored to the support and configured to move with respect thereto, and an actuating and/or detection device actuating the elements and/or detecting movement of the elements or frequency variations of the movement. The actuating and/or detection device includes an array of optical filters. Each filter resonates at a particular wavelength and is coupled to one of the elements. The actuating and/or detecting device is positioned in vicinity of all or some of the elements, between the elements and the support. The optical filters are fixed with respect to the support and the mechanical elements and the optical filters are superimposed.

Optomechanical device with mechanical elements and optical filters for actuating and/or detecting the movement of the elements

An in-plane MEMS or NEMS detection device for measuring displacements directed along a direction including a seismic mass suspended with respect to a substrate, the seismic mass being pivotable about an axis perpendicular to the plane of the substrate, at least one piezoresistive strain gauge mechanically connected to the seismic mass and the substrate, wherein the piezoresistive gauge has a thickness lower than that of the seismic mass, and wherein the axis of the piezoresistive strain gauge is orthogonal to the plane containing the pivot axis and the center of gravity of the seismic mass and the plane is orthogonal to the direction of the displacements to be measured.

In-plane piezoresistive detection sensor

A device is provided for determining the mass of a particle in suspension or in solution in a fluid, including a first device for the nebulization of the fluid to obtain a flux comprising at least the particle; a second device for the guidance and the aerodynamic focusing of the flux; and a third device for determining the mass of the particle by a frequency measurement, the third device including at least one gravimetric detector, arranged opposite an outlet of the second device, to receive the particle.

Device for determining the mass of a particle in suspension or in solution in a fluid

A device including: a nanowire that includes a first conductive region, and a second region, wherein the second region is an insulator material, the second region does not occupy an entire thickness of the nanowire, and the nanowire is configured so that a current is able to circulate in the nanowire from one end of the nanowire to another end of the nanowire.

Nanowire sensor device

A device with a suspended beam and piezoresistive means of detecting displacement of the beam and a method of manufacturing the device are disclosed. The device comprises a support, a suspended beam, moving parallel to the plane of the support, and means of detecting displacement, comprising at least two piezoresistive strain gauges that are not in line with each other. The beam is suspended through detection means. The two gauges are located on two opposite lateral faces of the beam respectively.

Device with suspended beam and piezoresistive means of detecting displacement of the beam and method of manufacturing the device

A resonant device with piezoresistive detection and with a resonator connected elastically to the support of the device, and method for manufacturing the device. The device includes: a support; a suspended resonator, which moves parallel to the plane of the support; an actuator for actuating the resonator; and a detector for detecting the movement, including at least one piezoresistive gauge. According to the invention, the resonator is anchored to the support through at least one flexurally elastic element, to enable the threshold where a non-linear displacement regime appears to be raised. The device can be manufactured by a surface technology, and applies notably to resonant mass sensors.

Resonant device with piezoresistive detection and with a resonator connected elastically to the support of the device, and method for manufacturing the device

An in-plane actuated resonant device, and method of manufacturing the device. The device includes a support; a suspended beam, moving parallel to the plane of the surface of the support and anchored to the support through at least one of its ends; and a mechanism actuating the beam to enable its displacement parallel to the support. The actuation mechanism includes at least one suspended element, anchored to the support and to one lateral face of the beam. The element moves when a control voltage is applied to the element and thus causes displacement of the beam. The device may be manufactured using surface technology and is applicable particularly for resonant mass sensors.

In-plane actuated resonant device and method of manufacturing the device

A nano electro-mechanical system (NEMS) formed on a substrate is provided including at least one fixed part associated with the substrate and at least one movable part in relation to the substrate, the system including a transduction component configured to excite the movable part to confer on it a movement and/or to detect a movement of the movable part, the transduction component including at least one electrically conductive material. The electrically conductive material is made of an AlSi alloy based deposition, the deposition being supported at least in part by the movable part of the system.

NEMS comprising AlSi alloy based transducer

An electromechanical resonator produced on a substrate, and a method of producing thereof, including: a suspended structure produced at least partly from the substrate, configured to have a vibration imparted to it such that it resonates at least one natural resonance frequency of the suspended structure; an anchor structure to anchor the suspended structure, by at least one area of its periphery, to the remainder of the substrate, and dimensioned to resonate at the resonance frequency; a mechanism to excite the suspended structure, to cause it to vibrate at the resonance frequency; and a mechanism to detect the vibration frequency of the suspended structure.

Growing community of inventors

Grenoble, France

Sebastien Hentz