Auxitrol S.a.

Centre National De La Recherche Scientifique

Sebastiano Brida

Amnon Brosh

Jean-Francois Le Néal

David Seyer

The invention relates to a pressure sensor including: a sensitive element including a mounting substrate, said mounting substrate including a top surface and a bottom surface, the sensitive element also including a deformable diaphragm that is connected to the top surface of the mounting substrate; a housing, in which the sensitive element is placed, said housing including a base; an intermediate structure placed between the base of the housing and the mounting substrate, said intermediate structure including a base, the base including a top surface and a bottom surface that is connected to the base of the housing, said intermediate structure being configured such as to keep the mounting substrate at a predetermined distance from the top surface of the intermediate structure; and an adhesive layer extending onto the top surface of the intermediate structure. Said adhesive layer has a thickness controlled by the predetermined distance at which the mounting substrate is kept from the top surface of the intermediate structure. The invention also relates to a method for making such a pressure sensor.

Pressure sensor including a structure for controlling an adhesive layer resistant to temperature variations

The invention relates to a method for producing a pressure sensor, comprising the following steps: assembling a support substrate with a deformable membrane on which strain gauges have been deposited, wherein the deformable membrane comprises a thinned area at the center thereof, the support substrate is disposed on top of the deformable membrane, the support substrate comprises an upper surface and a lower surface in contact with the deformable membrane, and the support substrate also comprises lateral recesses arranged on top of the strain gauges and a central recess arranged on top of the thinned area of the membrane, so as to obtain a micromechanical structure; and, once the assembly has been obtained, depositing, in a single step, at least one conductive material on the upper surface of the support and in the lateral recesses of the support, said conductive material extending into the recesses in order to be in contact with the strain gauges so as to form electrical contacts in contact with the strain gauges.

Method for producing a pressure sensor and corresponding sensor

The invention relates to a micromechanical structure for measuring or detecting a mechanical quantity or a dynamic quantity, including a deformable membrane () and a supporting substrate (), the membrane () including a first portion () and a second portion () surrounded by the first portion (), the second portion () having a thickness that is less than the thickness of the first portion (), the membrane () being suspended above the supporting substrate () and thus defining a free space (), said micromechanical structure comprising in addition a lower abutment () for limiting the deformations of the membrane (), said lower abutment () being arranged above the supporting substrate () and extending into the free space () from said supporting substrate () toward the membrane (), characterized in that the lower abutment () comprises islets (-) that extend into the free space () toward the membrane () from a flat surface of the lower abutment (), the islets (-) forming a relief structure in such a manner that, in the case of contact between the islets (-) and the fine portion () of the membrane (), the contact surface between the islets (-) and the fine portion () of the membrane () is small with respect to the dimensions of the fine portion () of the membrane ().

Micromechanical structure having a deformable membrane and a protection against strong deformations

The invention concerns a pressure sensing die to be mounted on a base, comprising: wherein the pedestal is a composite pedestal comprising top and bottom platforms connected by at least one small link having a mean cross-section smaller than the cross-section of the top platform, said small link isolating at least some of the stresses, produced by the mounting of the pressure sensing die on the base, from said deflectable pressure sensing diaphragm.

Stress isolated pressure sensing die, sensor assembly inluding said die and methods for manufacturing said die and said assembly

The invention relates to a pressure sensing die to be mounted on a base, comprising: The invention further relates to a method of manufacturing such a sensing die.

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Salles sur l'Hers, France

Sebastiano Brida