Asml Netherlands B.v.

Max-planck-gesellschaft Zur Forderung Der Wissenschaften E.v.

Asml Holding N.v.

Sebastian Thomas Bauerschmidt

Patrick Sebastian Uebel

Peter Maximilian Götz

Philip St J Russell

Paul William Scholtes-Van Eijk

Ronald Franciscus Herman Hugers

Paulus Antonius Andreas Teunissen

Andreas Johannes Antonius Brouns

Vitaliy Prosyentsov

Edwin Johannes Cornelis Bos

Jan Adrianus Boer

Mahesh Upendra Ajgaonkar

Coen Hubertus Matheus Baltis

Yongfeng Ni

Amir Abdolvand

Janneke Ravensbergen

Andrey Alexandrovich Nikipelov

Natallia Eduardauna Uzunbajakava

Philip Russell

Cristian Bogdan Craus

Mingli Niu

A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.

Mode control of photonic crystal fiber based broadband radiation sources

A radiation source includes: a hollow core optical fiber, a working medium; and a pulsed pump radiation source. The hollow core optical fiber has a body and has a hollow core. The working medium is disposed within the hollow core. The pulsed pump radiation source is arranged to produce pulsed pump radiation that is received by, and propagates through, the hollow core from an input end to an output end. One or more parameters of the pulsed pump radiation, the optical fiber and the working medium are configured to allow soliton self-compression of the pulsed pump radiation so as to change a spectrum of the pulsed pump radiation so as to form output radiation. In some embodiments, a length of the optical fiber is such that the output end substantially coincides with a position at which a temporal extent of the pulsed pump radiation is minimal.

Radiation source

Optical components and methods of manufacture thereof. A first optical component has a hollow-core photonic crystal fiber includes internal capillaries for guiding radiation and an outer capillary sheathing the internal capillaries; and at least an output end section having a larger inner cross-sectional dimension over at least a portion of the output end section than an inner cross-sectional dimension of the outer capillary along a central portion of the hollow-core photonic crystal fiber prior to the output end section. A second optical component includes a hollow-core photonic crystal fiber and a sleeve arrangement.

Hollow-core photonic crystal fiber based optical component for broadband radiation generation

A supercontinuum radiation source including a modulator being operable to modulate pump laser radiation including a train of radiation pulses to provide modulated pump laser radiation, the modulation being such to selectively provide a burst of the pulses; and a hollow-core photonic crystal fiber being operable to receive the modulated pump laser radiation and excite a working medium contained within the hollow-core photonic crystal fiber so as to generate supercontinuum radiation.

Supercontinuum radiation source and associated metrology devices

A method of processing an out-coupling end of a hollow core fiber including a plurality of anti-resonance elements surrounding a hollow core, and a hollow core fiber having been so processed. The method may include performing a tapering step to form a taper in the anti-resonance elements; performing a cleaving step at the taper to form at least one tapered out-coupling end of the hollow core fiber; and performing an end processing step including further heating the out-coupling end in a controlled manner to smoothen the out-coupling end.

Hollow core fiber light source and a method for manufacturing a hollow core fiber

A broadband light source device for creating broadband light pulses includes a hollow-core fiber and a pump laser source device. The hollow-core fiber is configured to create the broadband light pulses by an optical non-linear broadening of pump laser pulses. The hollow-core fiber includes a filling gas, an axial hollow light guiding fiber core configured to support core modes of a guided light field, and an inner fiber structure surrounding the fiber core and configured to support transverse wall modes of the guided light field. The pump laser source device is configured to create and provide the pump laser pulses at an input side of the hollow-core fiber. The transverse wall modes include a fundamental transverse wall mode and second and higher order transverse wall modes.

Broadband light source device and method of creating broadband light pulses

A device for connecting a fiber preform including a plurality of elongate holes extending substantially parallel to a longitudinal axis of the fiber preform to a pressure supply system, the device including a first surface to be connected to an end face of the fiber preform where the plurality of elongate holes end, a second surface including at least two ports configured to be in fluid connection with the pressure supply system, and a channel system within the device connecting the plurality of elongate holes at the first surface to the at least two ports, wherein a density of the at least two ports at the second surface is smaller than a density of the plurality of corresponding elongate holes at the first surface.

Device and method for connecting a fiber preform to a pressure supply system

Disclosed is an optical component, being configured to function as an optical frequency converter in a broadband radiation source device. The optical component comprises a gas cell, and a hollow-core photonic crystal fiber at least partially enclosed within said gas cell. The local cavity volume of said gas cell, where said hollow-core photonic crystal fiber is enclosed within the gas cell, comprises a maximum value of 36 cmper cm of length of said hollow-core photonic crystal fiber.

An apparatus for receiving input radiation and broadening a frequency range of the input radiation to provide broadband output radiation. The apparatus includes a chamber, a fiber, a gas generating apparatus, and a radical generating apparatus. The fiber includes a hollow core configured to guide radiation propagating through the fiber, the hollow core in fluid communication with the chamber. The gas generating apparatus is configured to provide a gas within the chamber. The radical generating apparatus is configured to provide free radicals within the chamber to reduce contaminants in the gas. The apparatus may be included in a radiation source.

Frequency broadening apparatus and method

A mounted hollow-core fiber arrangement includes a hollow-core fiber having a microstructure, and a mount arrangement including a plurality of mounting contacts configured to apply a force to an outer layer of the hollow-core fiber. A portion of the hollow-core fiber is located in a receiving region of the mount arrangement. The plurality of mounting contacts are positioned around the receiving region. The mounting contacts are distributed around the receiving region, the distribution of the mounting contacts corresponding to a distribution of features of the microstructure of the hollow-core fiber. The mounted hollow core fiber can be used in a radiation source apparatus for providing broadband radiation.

Mounted hollow-core fiber arrangement

A hollow-core photonic crystal fiber (HC-PCF) () for guiding at least one mode of a light field () along a mode guiding section () of the HC-PCF (), comprises an outer jacket (), an inner cladding () and a hollow core (), which extend along the HC-PCF (), wherein the inner cladding () is arranged on an interior surface of the outer jacket () and comprises anti-resonant structures () surrounding the hollow core (), and the hollow core () has a mode guiding core diameter (d) provided along the mode guiding section of the HC-PCF (), and wherein at least one fiber end () of the HC-PCF () has a light field coupling section () in which the hollow core () is tapered over an axial coupling section length from a fiber end core diameter (D) at the at least one fiber end () to the mode guiding core diameter (d). Furthermore, methods of using the HC-PCF and manufacturing the HC-PCF are described.

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Wendelstein, Germany

Sebastian Thomas Bauerschmidt