Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.v.

Albert-Ludwigs-Universitat Freiburg

Sebastian Mack

Daniel Biro

Andreas Wolf

Ralf Preu

Ulrich Jager

Gero Kastner

Anne-Kristin Volk

Johannes Seiffe

Ulrich JÄGER

Gero KÄSTNER

A method for producing a photovoltaic solar cell, including the following steps: A. texturizing a front () of a semiconductor substrate; B. generating a selective emitter doping on the front () of the semiconductor substrate by generating on the front () a first low-doped region () and a local high-doped region () within the first low-doped region; and C. applying at least one metal emitter contact structure to the front () of the semiconductor substrate, at least in the regions of local high doping, wherein, between method steps B and C, a respective silicon oxide layer () is generated in a method step Bsimultaneously on the front and back of the semiconductor substrate via thermal oxidation.

Method for producing a photovoltaic solar cell

A method for producing a selective doping structure in a semiconductor substrate in order produce a photovoltaic solar cell. The method includes the following steps: A) applying a doping layer () to the emitter side of the semiconductor substrate, B) locally heating a melting region of the doping layer () and a melting region of the semiconductor substrate lying under the doping layer () in such a way that dopant diffuses from the doping layer () into the melted semiconductor substrate via liquid-liquid diffusion, so that a high doping region () is produced after the melt mixture solidifies, C) producing the planar low doping region by globally heating the semiconductor substrate, D) removing the doping layer () and E) removing or converting a layer of the semiconductor substrate on the doping side in such a way that part of the low doping region and of the high doping region close to the surface is removed or is converted into an electrically non-conducting layer.

Method for producing a selective doping structure in a semiconductor substrate in order to produce a photovoltaic solar cell

Growing community of inventors

Freiburg, Germany

Sebastian Mack