Infineon Technologies Ag

Sebastian Luber

Bernhard Winkler

Dirk Meinhold

Wolfram Langheinrich

Thomas Bever

Florian Brandl

Robert Gruenberger

Hansjoerg Walter Kuemmel

Roland Meier

Jürgen Zimmer

Christian Kegler

A semiconductor device and a method of manufacturing the same are provided. The semiconductor device includes a semiconductor chip including a substrate having a first surface and a second surface arranged opposite to the first surface; at least one stress-decoupling trench that extends from the first surface into the substrate, where the at least one stress-decoupling trench extends partially into the substrate towards the second surface although not completely to the second surface; a microelectromechanical systems (MEMS) element, including a sensitive area, disposed at the first surface of the substrate and laterally spaced from the at least one stress-decoupling trench; and a stress-decoupling material that fills the at least one stress-decoupling trench and covers the sensitive area of the MEMS element.

Mechanical stress decoupling for microelectromechanical systems (MEMS) elements with gel-filling

An example multi-turn counter (MTC) sensor includes a magnetic strip that includes a domain wall generator located at a first end of the magnetic strip, where the domain wall generator is to generate at least one domain wall in the magnetic strip, the at least one domain wall configured to propagate based on a magnetic field caused by a magnet; wherein a location of the at least one domain wall indicates a turn count of the magnetic field of the magnet; the turn count to indicate one or more of a predefined fraction of a full rotation of the magnetic field; an end tip located at a second end of the magnetic strip, where the second end of the magnetic strip is opposite the first end; and a plurality of overlapping strip turns that cause a plurality of crossings in the magnetic strip.

Multi-turn counter sensor

Growing community of inventors

Oberschleißheim, Germany

Sebastian Luber