Carl Zeiss Smt Gmbh

Sebastian Brueck

Michael Gerhard

Vitaliy Shklover

An optical grating () includes a substrate (), on the surface () of which a periodic structure () is formed that is embodied to diffract incident radiation (), in particular incident EUV radiation, with a specified wavelength (&#x3bb;) into a predetermined order of diffraction, in particular into the first order of diffraction (m=+). The optical grating also has a coating () applied onto the periodic structure with at least one layer () that is embodied to suppress the diffraction of the incident radiation into at least one higher order of diffraction (m=+, . . . ) than the predetermined order of diffraction.

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Ulm, Germany

Sebastian Brueck