Intel Corporation

Tahoe Research, Ltd.

Sean T Ma

Gilbert W Dewey

Jack T Kavalieros

Willy Rachmady

Matthew V Metz

Tahir Ghani

Anand S Murthy

Cheng-Ying Huang

Harold W Kennel

Abhishek A Sharma

Van H Le

Aaron D Lilak

Chandra S Mohapatra

Andy Chih-Hung Wei

Nicholas G Minutillo

Justin R Weber

Rishabh Mehandru

Patrick R Morrow

Glenn A Glass

Stephen M Cea

Guillaume Bouche

Benjamin Chu-Kung

Seung Hoon Sung

Cory E Weber

Shriram Shivaraman

Patrick H Keys

Hui Jae Yoo

Ehren Mannebach

Dipanjan Basu

Biswajeet Guha

Sanaz Kabehie Gardner

Yih Wang

Nazila Haratipour

Urusa Alaan

Abhishek Sharma

Piyush Mohan Sinha

Marko Radosavljevic

Charles C Kuo

Kimin Jun

Nicole K Thomas

Scott Bruce Clendenning

Roza Kotlyar

Anh Phan

Travis W LaJoie

Miriam Ruth Reshotko

Nadia M Rahhal-Orabi

Dax M Crum

Arnab Sen Gupta

Susmita Ghose

Kent Millard

Inanc Meric

Van H Lee

Ahn Phan

Arunshankar Venkataraman

Mwilwa Tambwe

Wilhelm Melitz

Will Rachmady

Top-gate thin film transistor (TFTs) structures. Thin film transistors when in the top-gate configuration suffer from contact resistance. An example TFT includes a semiconductor layer doped with one or more dopant elements. A gate dielectric layer is on the semiconductor layer, and a gate electrode is on the gate dielectric layer. The semiconductor layer is doped with the one or more dopant elements beneath the gate dielectric layer. The TFT may further include one or more contacts and/or one or more gate spacers, and the semiconductor layer may further be doped with the one or more dopant elements beneath the contact(s) and/or gate spacer(s).

Top-gate doped thin film transistor

Disclosed herein are source/drain regions in integrated circuit (IC) structures, as well as related methods and components. For example, in some embodiments, an IC structure may include: a channel region including a semiconductor material; and a source/drain region at a side face of the channel region, wherein the source/drain region includes a semiconductor portion and a contact metal, and the semiconductor portion is between the contact metal and the semiconductor material.

Source/drain regions in integrated circuit structures

Disclosed herein are source/drain regions in integrated circuit (IC) structures, as well as related methods and components. For example, in some embodiments, an IC structure may include: an array of channel regions, including a first channel region and an adjacent second channel region; a first source/drain region proximate to the first channel region; a second source/drain region proximate to the second channel region; and an insulating material region at least partially between the first source/drain region and the second source/drain region.

Techniques are provided herein to form semiconductor devices having a stacked transistor configuration. An n-channel device and a p-channel device may both be gate-all-around (GAA) transistors each having any number of nanoribbons extending in the same direction where one device is located vertically above the other device. According to some embodiments, the n-channel device and the p-channel device conductively share the same gate, and a width of the gate structure around one device is greater than the width of the gate structure around the other device. According to some other embodiments, the n-channel device and the p-channel device each have a separate gate structure that is isolated from the other using a dielectric layer between them. A gate contact is adjacent to the upper device and contacts the gate structure of the other lower device.

Asymmetric gate structures and contacts for stacked transistors

Embodiments disclosed herein include three-dimensional 3D arrays of memory cells and methods of forming such devices. In an embodiment a memory device comprises, a substrate surface, and a three-dimensional (3D) array of memory cells over the substrate surface. In an embodiment each memory cell comprises a transistor and a capacitor. In an embodiment the transistor of each memory cell comprises, a semiconductor channel, with a first end of the semiconductor channel electrically coupled to a bit line that runs substantially parallel to the substrate surface, and a second end of the semiconductor channel is electrically coupled to the capacitor. The transistor may also comprise a gate dielectric on a surface of the semiconductor channel between the first end and the second end of the semiconductor channel. In an embodiment, the gate dielectric is contacted by a word line that runs substantially perpendicular to the substrate surface.

3D 1T1C stacked dram structure and method to fabricate

Discussed herein is gate spacing in integrated circuit (IC) structures, as well as related methods and components. For example, in some embodiments, an IC structure may include: a first gate metal having a longitudinal axis; a second gate metal, wherein the longitudinal axis of the first gate metal is aligned with a longitudinal axis of the second gate metal; a first dielectric material continuously around the first gate metal; and a second dielectric material continuously around the second gate metal, wherein the first dielectric material and the second dielectric material are present between the first gate metal and the second gate metal.

Gate spacing in integrated circuit structures

A transistor includes a body of semiconductor material, where the body has laterally opposed body sidewalls and a top surface. A gate structure contacts the top surface of the body. A source region contacts a first one of the laterally opposed body sidewalls and a drain region contacts a second one of the laterally opposed body sidewalls. A first isolation region is under the source region and has a top surface in contact with a bottom surface of the source region. A second isolation region is under the drain region and has a top surface in contact with a bottom surface of the drain region. Depending on the transistor configuration, a major portion of the inner-facing sidewalls of the first and second isolation regions contact respective sidewalls of either a subfin structure (e.g., FinFET transistor configurations) or a lower portion of a gate structure (e.g., gate-all-around transistor configuration).

Transistor with isolation below source and drain

Discussed herein is device contact sizing in integrated circuit (IC) structures. In some embodiments, an IC structure may include: a first source/drain (S/D) contact in contact with a first S/D region, and a second S/D contact in contact with a second S/D region, wherein the first S/D region and the second S/D region have a same length, and the first S/D contact and the second S/D contact have different lengths.

Device contact sizing in integrated circuit structures

Material systems for source region, drain region, and a semiconductor body of transistor devices in which the semiconductor body is electrically insulated from an underlying substrate are selected to reduce or eliminate a band to band tunneling ('BTBT') effect between different energetic bands of the semiconductor body and one or both of the source region and the drain region. This can be accomplished by selecting a material for the semiconductor body with a band gap that is larger than a band gap for material(s) selected for the source region and/or drain region.

Reducing off-state leakage in semiconductor devices

A transistor is described. The transistor includes a substrate, a first semiconductor structure above the substrate, a second semiconductor structure above the substrate, a source contact that includes a first metal structure that contacts a plurality of surfaces of the first semiconductor structure and a drain contact that includes a second metal structure that contacts a plurality of surfaces of the second semiconductor structure. The transistor also includes a gate below a back side of the substrate.

Transistor including wrap around source and drain contacts

Stacked finFET structures including a fin having at least a first layer of semiconductor material stacked over or under a second layer of semiconductor material. The first and second layers may include a Group IV semiconductor material layer and a Group III-V semiconductor material layer, for example. A stacked finFET may include an N-type finFET stacked over or under a P-type finFET, the two finFETs may have channel portions within the different semiconductor material layers. Channel portions of the first and second layers of semiconductor material may be coupled to separate gate electrodes that are vertically aligned. Channel portions of the first and second layers of semiconductor material may be vertically separated by subfin portions of the first and second layers. Different layers of dielectric material adjacent to the subfin portions may improve electrical isolation between the channel portions, for example as a source of fixed charge or impurity dopants.

Vertically stacked finFETs and shared gate patterning

Techniques are disclosed for integrating semiconductor oxide materials as alternate channel materials for n-channel devices in integrated circuits. The semiconductor oxide material may have a wider band gap than the band gap of silicon. Additionally or alternatively, the high mobility, wide band gap semiconductor oxide material may have a higher electron mobility than silicon. The use of such semiconductor oxide materials can provide improved NMOS channel performance in the form of less off-state leakage and, in some instances, improved electron mobility as compared to silicon NMOS channels.

High performance semiconductor oxide material channel regions for NMOS

Embodiments disclosed herein include thin film transistors and methods of forming such thin film transistors. In an embodiment, the thin film transistor may comprise a substrate, a gate electrode over the substrate, and a gate dielectric stack over the gate electrode. In an embodiment, the gate dielectric stack may comprise a plurality of layers. In an embodiment, the plurality of layers may comprise an amorphous layer. In an embodiment, the thin film transistor may also comprise a semiconductor layer over the gate dielectric. In an embodiment, the semiconductor layer is a crystalline semiconductor layer. In an embodiment, the thin film transistor may also comprise a source electrode and a drain electrode.

Multi-dielectric gate stack for crystalline thin film transistors

Monolithic FETs including a fin of a first semiconductor composition disposed on a sub-fin of a second composition. In some examples, an InGaAs fin is grown over GaAs sub-fin. The sub-fin may be epitaxially grown from a seeding surface disposed within a trench defined in an isolation dielectric. The sub-fin may be planarized with the isolation dielectric. The fin may then be epitaxially grown from the planarized surface of the sub-fin. A gate stack may be disposed over the fin with the gate stack contacting the planarized surface of the isolation dielectric so as to be self-aligned with the interface between the fin and sub-fin. Other embodiments may be described and/or claimed.

Field effect transistors with gate electrode self-aligned to semiconductor fin

Disclosed herein are non-planar transistor (e.g., nanoribbon) arrangements having asymmetric gate enclosures on at least one side. An example transistor arrangement includes a channel material shaped as a nanoribbon, and a gate stack wrapping around at least a portion of a first face of the nanoribbon, a sidewall, and a portion of a second face of the nanoribbon. Portions of the gate stack provided over the first and second faces of the nanoribbon extend in a direction parallel to the longitudinal axis of the nanoribbon for a certain distance that may be referred to as a 'gate length.' A portion of the gate stack wrapping around the sidewall of the nanoribbon does not extend along the entire gate length, but, rather, extends over less than a half of the gate length, e.g., about one third of the gate length, thus making the gate enclosure on that sidewall asymmetric.

Non-planar transistor arrangements with asymmetric gate enclosures

Growing community of inventors

Portland, OR, United States of America

Sean T Ma