Mks Instruments, Inc.

Eni Technology, Inc.

Eni Technologies Inc.

Sendec Corporation

Global Digital Instruments LLC

Sean O Harnett

Jesse N Klein

Mark D Tracy

Richard E Church

David L Sestito

Daniel H Cotter

Richard W Brounley

A clutch actuator for an electromechanical clutch having a solenoid actuating coil initially provides power to the solenoid at a high rate by using a high duty cycle pulse with a modulated controller. When the initial engagement of the clutch elements is sensed by a decrease in current, the duty cycle of the pulse width modulator is reduced and thereafter increased in a controlled fashion to accomplish a soft start.

Soft start clutch controller

An impedance matching network includes a first input port that receives radio frequency (RF) power and includes an input impedance, an output port that provides the RF power and includes an output impedance, and a variable capacitance module that varies the output impedance. The variable capacitance module includes a first variable capacitor, a second variable capacitor, a first motor, and a second motor that adjusts a capacitance of the second variable capacitor. A relationship between a desired value of the capacitance and an actual value of the capacitance is dependent on a capacitance of the first variable capacitor.

Tune range limiter

A clutch actuator for an electromechanical clutch having a solenoid actuating coil initially provides power to the solenoid at a high rate by using a high duty cycle pulse with a modulated controller. When the initial engagement of the clutch elements is sensed by a decrease in current, the duty cycle of the pulse with modulator is reduced and thereafter increased in a control fashion to accomplish a soft start.

A method and apparatus for controlling a power supply. The system includes a power supply and a controller for outputting a command signal to regulate the operation of the power supply. The controller determines the command signal based on at least one error signal which is selected from a plurality of error signals based on a selection criterion.

Power supply control loop with multiple leveling modes

A fuzzy logic control arrangement is provided for an impedance match network of the type that is typically employed between a source of RF power at a given impedance, e.g., 50 ohms, and a non-linear load whose impedance can vary in magnitude and phase, e.g., an RF plasma. The fuzzy logic controller fuzzifies the phase and the magnitude error signals. The error signals are applied to a fuzzy logic interference function based on a number of fuzzy sets. The values of the error signals enjoy some degree of membership in one or more fuzzy sets. Fuzzy logic rules are applied to the phase and magnitude error signals. In a defuzzification stage, drive signal values are obtained for moving the tuning elements of the variable impedances. The drive signal values are weighted according to respective fuzzy inference functions for which the error signals enjoy membership. Then the weighted drive signal values are combined to produce output drive signals.

Fuzzy logic tuning of RF matching network

The present hot switching method and impedance matching circuit extends the tuning range of matching circuits to include increased power levels. The hot switching method and circuit includes coupling a controlled impedance network between an RF generator output and a plasma chamber input for matching impedances. The controlled impedance network includes an RF switch for switching a predetermined impedance. A device performance characteristic of the RF switch is determined. RF power is applied from the RF generator through the controlled impedance network to the plasma chamber. A signal characteristic of the impedance match is measured. The RF switch is controlled based upon the measured signal characteristic such that the impedance match is driven towards a predetermined matching range. The RF switch is switched any speed based upon the device performance characteristic.

Method of hot switching a plasma tuner

A fuzzy logic control arrangement is provided for an impedance match network of the type that is typically employed between a source of RF power at a given impedance, e.g., 50 ohms, and a non-linear load whose impedance can vary in magnitude and phase, e.g., an RF plasma. The fuzzy logic controller fuzzifies the phase and the magnitude error signals. The error signals are applied to a fuzzy logic inference function based on a number of fuzzy sets. The values of the error signals enjoy some degree of membership in one or more fuzzy sets. Fuzzy logic rules are applied to the phase and magnitude error signals. In a defuzzification stage, drive signal values are obtained for moving the tuning elements of the variable impedances. The drive signal values are weighted according to respective fuzzy inference functions for which the error signals enjoy membership. Then the weighted drive signal values are combined to produce output drive signals.

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Penfield, NY, United States of America

Sean O Harnett