Murata Manufacturing Co., Ltd.

Resonant, Inc.

Sean McHugh

Neal O Fenzi

Greg Dyer

Patrick J Turner

Andrew C Guyette

John Pandelis Koulakis

Garrett Williams

Andrew Kay

Albert Cardona

Kurt Raihn

Ventsislav Yantchev

Bryant Garcia

Gregory L Hey-Shipton

Gregory Lynton Hey-Shipton

Mike Eddy

Filip Iliev

Viktor Plesski

Robert B Hammond

Dylan J Kelly

Julius Koskela

Soumya Yandrapalli

Jesson John

Douglas Jachowski

Wei Yang

Luke Myers

Filip L Iliev

Marie Chantal Mukandatimana

Timothy Palomo

Chris O′Brien

An apparatus for filtering radio frequency signals is provided. The apparatus includes a substrate and a membrane coupled to the substrate that includes piezoelectric material. The apparatus also includes an interdigital transducer (IDT) coupled to the membrane and includes a plurality of interleaved fingers. The apparatus also includes a lid, in which the membrane is arranged between the substrate and the lid with a first cavity having a first height between the lid and a first main surface of the membrane and a second cavity having a second height between the substrate and a second main surface of the membrane that opposes the first main surface. Moreover, the first height between the lid and the first main surface of the membrane is greater than a pitch of at least one pair of interleaved fingers of the plurality of interleaved fingers and at most four times greater than the second height.

Acoustic resonator lid for thermal transport

A filter device is provided that includes a substrate having a surface and a piezoelectric plate supported by the substrate. A plurality of interdigital transducers (IDTs) for multiple resonators are provided that each have interleaved fingers at respective diaphragms of the piezoelectric plate disposed over one or more cavities. Moreover, a first resonator includes a first plurality of interleaved fingers having a first pitch and a second resonator includes a second plurality of interleaved fingers having a second pitch that is different than the first pitch. This configuration adjusts the resonance frequencies of each resonator. Moreover, a dielectric layer may be uniformly disposed over at least one surface of the respective diaphragms of the piezoelectric plate.

Ladder filter with transversely-excited film bulk acoustic resonators having different pitches

Filter devices are disclosed. A filter device includes a piezoelectric plate comprising a supported portion, a first diaphragm, and a second diaphragm. The supported portion is attached to a substrate and the first and second diaphragms spans respective cavities in the substrate. A first interdigital transducer (IDT) has interleaved fingers on the first diaphragm. A second interdigital transducer (IDT) has interleaved fingers on the second diaphragm. A first dielectric layer is between the interleaved fingers of the first IDT, and a second dielectric layer is between the interleaved fingers of the second IDT. A thickness of the first dielectric layer is greater than a thickness of the second dielectric layer. The piezoelectric plate and the first and second IDTs are configured such that radio frequency signals applied to first and second IDTs excite primary shear acoustic modes in the respective diaphragms.

Filter device

Acoustic resonators, acoustic filter devices and methods of making the same. An acoustic resonator device includes a piezoelectric plate having front and back surfaces, an interdigital transducer (IDT) on the front surface including interleaved fingers extending alternately from opposed first and second busbars, an overlapping distance of the interleaved fingers defining an aperture of the acoustic resonator device, and a dielectric layer formed over and between the interleaved fingers, wherein the dielectric layer extends from between an edge of the aperture and the first busbar to between the an opposite edge of the aperture and the second busbar.

Transversely-excited film bulk acoustic resonators with improved coupling and reduced energy leakage

A filter device is provided that includes a substrate and a piezoelectric plate attached to the substrate. A conductor pattern is formed at a first surface of the piezoelectric plate and includes interdigital transducers of series and shunt resonators that each have interleaved fingers at respective diaphragms of the plate suspended. A first dielectric coating layer is formed over the interleaved fingers of the IDTs and on the first surface of the piezoelectric plate; and a second dielectric coating layer is formed on the second surface of the piezoelectric plate that is opposite the first surface. The second dielectric coating layer of the shunt resonator has a greater thickness than a thickness of the at least one second dielectric coating layer of the series resonator.

Tuning acoustic resonators with back-side coating

Acoustic filters devices and methods of making the same. A filter device includes a plurality of series resonators acoustically coupled along a first shared acoustic track and a plurality of shunt resonators acoustically coupled along a second shared acoustic track and electrically coupled to the plurality of series resonators.

Acoustic filters with shared acoustic tracks

An acoustic filter device includes first and second series resonators and at least one shunt resonator, each shunt resonator electrically coupled to the first series resonator or the second series resonator. Each of the first and second series resonators includes respective first and second sub-resonators electrically connected in series, The first sub-resonators of the first and second series resonators are acoustically coupled along a first shared acoustic track. The second sub-resonators of the first and second series resonators are acoustically coupled along a second shared acoustic track.

Acoustic filters with shared acoustic tracks and cascaded series resonators

Acoustic filters devices and methods of making the same. A filter device includes a first plurality of acoustic resonators including at least one first series resonator and at least one first shunt resonator. The at least one first series resonator and the at least one first shunt resonator are acoustically coupled along a first shared acoustic track.

Acoustic filters with shared acoustic tracks for series and shunt resonators

Acoustic resonator devices and filters are disclosed. An acoustic resonator includes a substrate and a piezoelectric plate supported by the substrate. A portion of the piezoelectric plate suspended across a cavity in the substrate forms a diaphragm. A decoupling dielectric layer is on a front surface of the diaphragm. An interdigital transducer (IDT) has interleaved fingers on the decoupling dielectric layer over the diaphragm. The IDT and piezoelectric plate are configured such that a radio frequency signal applied to the IDT excites shear acoustic waves in the diaphragm.

Decoupled transversely-excited film bulk acoustic resonators

Acoustic resonators, filters, and methods. An acoustic resonator includes a substrate, a piezoelectric plate, and a diaphragm including a portion of the piezoelectric plate spanning a cavity in a substrate. An interdigital transducer (IDT) on a front surface of the piezoelectric plate includes first and second sets of interleaved interdigital transducer (IDT) fingers extending from first and second busbars respectively. The interleaved IDT fingers extend onto the diaphragm. Overlapping portions of the interleaved IDT fingers define an aperture of the acoustic resonator. First and second dielectric strips are on the front surface of the piezoelectric plate. Each dielectric strip has a first portion under the IDT fingers in a respective margin of the aperture and a second portion extending into a gap between the respective margin and the respective busbar.

Transversely-excited film bulk acoustic resonator with buried oxide strip acoustic confinement structures

Acoustic resonators, filters, and methods. A filter includes a piezoelectric plate supported by a substrate; and three or more diaphragms of the piezoelectric plate spanning a respective cavity in the substrate. A conductor pattern on the plate has interdigital transducers (IDTs) of three or more acoustic resonators. Each IDT has two sets of interleaved fingers extending from two busbars respectively. Overlapping portions of the fingers define an aperture of each acoustic resonator. Sometimes, each of the resonators has two dielectric strips that overlap the IDT fingers in first and second margins of the aperture and that extend into first and second gaps between the first and second margins and the busbars. Other times, the first and second dielectric strips are on the front surface of the plate, have a first portion under the IDT fingers and have a second portion extending into a gap between the margins and the busbars.

Transversely-excited film bulk acoustic resonator with oxide strip acoustic confinement structures

Diplexers, filter devices, and methods are disclosed. A diplexer includes a first chip comprising series resonators of a high band filter, a second chip comprising shunt resonators of the high band filter and series resonators of a low band filters, and a third chip comprising shunt resonators of the low band filter. The series resonators and the shunt resonators of the high band filter are decoupled transversely-excited film bulk acoustic resonators (DXBARs). The series resonators and the shunt resonators of the low band filter are transversely-excited film bulk acoustic resonators (XBARs).

Diplexer using decoupled transversely-excited film bulk acoustic resonators

Acoustic resonator devices and filters are disclosed. An acoustic resonator includes a substrate and a piezoelectric plate having front and back surfaces, the back surface attached to the substrate. A decoupling dielectric layer is on the front surface of the piezoelectric plate. An interdigital transducer (IDT) is formed over the decoupling dielectric layer such that interleaved fingers of the IDT are over a portion of the piezoelectric plate suspended across a cavity formed in the substrate. A thickness of the interleaved fingers is greater than or equal to 1.17 times a thickness of the piezoelectric plate and less than or equal to 1.7 times the thickness of the piezoelectric plate.

Decoupled transversely-excited film bulk acoustic resonators for high power filters

Acoustic resonators, filters, and methods. An acoustic resonator includes a substrate, piezoelectric plate, and a diaphragm comprising a portion of the piezoelectric plate spanning a cavity in a substrate. An interdigital transducer (IDT) on a front surface of the piezoelectric plate includes first and second sets of interleaved interdigital transducer (IDT) fingers extending from first and second busbars respectively. The interleaved IDT fingers are on the diaphragm. Overlapping portions of the interleaved IDT fingers define an aperture of the acoustic resonator. A first dielectric strip overlaps the IDT fingers in a first margin of the aperture and extends into a first gap between the first margin and the first busbar. A second dielectric strip overlaps the IDT fingers in a second margin of the aperture and extends into a second gap between the second margin and the second busbar.

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Santa Barbara, CA, United States of America

Sean McHugh