Microsoft Technology Licensing, LLC

3m Innovative Properties Company

Lam Research Corporation

Sean M Donnelly

Jason D Wilson

Arlie R Conner

Timothy Scott Thomas

Peter Richard Oehler

Michael John Selep

Karl Frederick Leeser

Jonathan Westhues

Patrick G Breiling

David William Kamp

Simon Magarill

R Edward English, Jr

Bin Luo

Denis Varlamov

Eric Immel

Yingying Tang

Arlie Richard Connor

Matthew B Schick

Showerheads for semiconductor processing equipment are disclosed that include various features designed to promote thermal control of the showerhead in high-temperature applications.

Thermally controlled chandelier showerhead

A faceplate of a showerhead has a bottom side that faces a plasma generation region and a top side that faces a plenum into which a process gas is supplied during operation of a substrate processing system. The faceplate includes apertures formed through the bottom side and openings formed through the top side. Each of the apertures is formed to extend through a portion of an overall thickness of the faceplate to intersect with at least one of the openings to form a corresponding flow path for process gas through the faceplate. Each of the apertures has a cross-section that has a hollow cathode discharge suppression dimension in at least one direction. Each of the openings has a cross-section that has a smallest cross-sectional dimension that is greater than the hollow cathode discharge suppression dimension.

Showerhead faceplate having flow apertures configured for hollow cathode discharge suppression

Embodiments of a touch-sensitive display device are disclosed herein. According to a first aspect, a touch-sensitive display device comprises an electrode matrix including transmit electrodes and receive electrodes; a conductive plane; and a controller configured to cause a transmit electrode driver to drive the transmit electrodes in a mutual capacitance mode. The controller is configured to cause the transmit electrodes, the receive electrodes, and the conductive plane to be connected to a common charging voltage during charge periods of a self-capacitance mode; to, during discharge periods of the self-capacitance mode that alternate with the charge periods, cause the transmit electrodes, the receive electrodes, and the conductive plane to be connected to a common reference voltage; and to, during the discharge periods, cause the transmit electrodes and the receive electrodes to be coupled to receive circuitry configured to measure self-capacitance of the transmit electrodes and the receive electrodes.

Touch-sensitive display device

A display device comprises a sensing subsystem configured to detect one or more conditions associated with touch input to the display device occurring via a contact of an input object at a surface of the display device. The display device further comprises a microphone system configured to receive sound, a logic machine, and a storage machine holding instructions. The instructions are executable by the logic machine to determine, based on the one or more conditions, a time of the contact; determine, based on at least the time of the contact, some characteristics of the contact; and generate an audio output via applying a selective attenuation to process sound received into the microphone system. The selective attenuation is selected based on the sonic characteristics and applied over a time interval beginning at the determined time of contact.

Selective attenuation of sound for display devices

A display device includes an array of display pixels having display pixel apertures that are periodic along two orthogonal directions, x and y, at spatial frequencies fand f, respectively. An array of electrodes is overlaid on the array of display pixel apertures. The array of electrodes is comprised of a metal mesh having openings that are periodic along a first direction u at an angle &#x3b8;relative to x, and along a second direction v at an angle &#x3b8;relative to y, and at spatial frequencies fand f. The array of electrodes is overlaid on the array of display pixels such that the parameter set {&#x3b8;, f, f, &#x3b8;, f, f} satisfies specific geometric criteria in order to minimize perceptible moir&#xe9; patterns.

Touch display system with reduced moir&#xe9; patterns

An array of electrodes is comprised of a plurality of electrodes. Each electrode extends along a first direction X, and is periodically arrayed along a second direction Y perpendicular to X at a pitch p. Each electrode further comprises a continuous periodic metal mesh having a square unit cell of edge length p, the square unit cell having axes displaced by an oblique angle &#x3b8; from X and Y The array is configured such that &#x3b8;=arctan (a/b) and p=n*p/(m*sqrt(a+b)), where a, b, m, and n are positive integers. In this way, the electrodes repeat with a finite repeat length, while rendering the common edges of the repeating units visually imperceptible by a user.

Mesh electrode matrix having finite repeat length

Electrode matrices for capacitive touch-sensing are provided. An electrode matrix may include a plurality of electrodes separated by gaps. Each electrode may include a plurality of spaced apart conductors electrically connected at opposed ends by respective tie structures. The conductors of each electrode may be electrically bridged at intervals by a plurality of jumpers. The electrode matrix may further include a plurality of pseudo jumpers positioned within the gaps and configured to be non-conductive across their entire lengths.

Capacitive touch sensor having pseudo jumpers

Electrode matrices for capacitive touch-sensing are provided. An electrode matrix may include a plurality of column conductors having a first end and a second end formed along a central longitudinal axis. The column conductor may further include a column zigzag structure extending between the first end and the second end. The electrode matrix may further include a plurality of row conductors having a first end and a second end formed along a lateral axis. The row conductor may further include a row zigzag structure extending between the first end and second end. The zigzag structure of each of the plurality of column conductors may cross the zigzag structure of each of the plurality of row conductors in respective crossing regions that are formed at an intersection of the longitudinal axis of each column conductor and lateral axis of each row conductor.

Capacitive touch sensor having oblique electrode matrix

To address the above issues, a display device with a capacitive touch screen display having a touch surface in close proximity to a display stack is provided. The display may include a touch sheet with a top surface, a touch sensor having a matrix of capacitors formed of electrodes positioned below the touch sheet and configured to exhibit a change in capacitance of at least one of the capacitors in response to a touch on the top surface by a digit or stylus of a user, a display stack positioned below the matrix of capacitors and configured to emit light through a top surface of the display stack to travel in a light emitting direction through the matrix of capacitors and the touch sheet. A distance between the top surface of the touch sheet and the top surface of the display stack is between about 225 and 1500 micrometers.

Capacitive touch surface in close proximity to display

An illumination source includes a number of light emitting diodes (LEDs) operating at a first wavelength. Light from the LEDs illuminates a phosphor material that generates light at a second wavelength. A reflective polarizer transmits light at the second wavelength in a first polarization state and reflects light at the second wavelength in a second polarization state orthogonal to the first polarization state. The light at the second wavelength reflected by the reflective polarizer is directed back towards the phosphor material without an increase in angular range. In some embodiments the LEDs, having a conformal layer of phosphor material, are attached directly to the first surface of a liquid cooled plate. A liquid coolant contacts a second surface of the plate.

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Portland, OR, United States of America

Sean M Donnelly