L'air Liquide Société Anonyme Pour L'etude Et L'exploitation Des Procédés Georges Claude

American Air Liquide, Inc.

Air Liquide Advanced Materials, Inc.

L'air Liquide Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude

Sean Kerrigan

Jean-Marc Girard

Peng Zhang

Manish Khandelwal

Antonio Sanchez

Gennadiy Itov

Glenn Kuchenbeiser

Cole Ritter

Zhiwen Wan

Yang Wang

Matthew Damien Stephens

Reno Pesaresi

Guillaume Husson

David Orban

Nicolas Blasco

Larry Kit-wing Leung

Grigory Nikiforov

A Si-containing film forming composition comprising a catalyst and/or a polysilane and a N&#x2014;H free, C-free, and Si-rich perhydropolysilazane having a molecular weight ranging from approximately 332 dalton to approximately 100,000 dalton and comprising N&#x2014;H free repeating units having the formula [&#x2014;N(SiH3)x(SiH2-)y], wherein x=0, 1, or 2 and y=0, 1, or 2 with x+y=2; and x=0, 1 or 2 and y=1, 2, or 3 with x+y=3. Also disclosed are synthesis methods and applications for using the same.

Perhydropolysilazane compositions and methods for forming oxide films using same

Si-containing film forming compositions are disclosed comprising a precursor having the formula [&#x2014;NR&#x2014;RRSi&#x2014;(CH)&#x2014;SiRR&#x2014;]wherein n=2 to 400; R, R, R, R, and Rare independently H, a hydrocarbon group, or an alkylamino group, and provided that at least one of R, R, R, and Ris H; and R is independently H, a hydrocarbon group, or a silyl group. Exemplary pre-cursors include, but are not limited to, [&#x2014;NH&#x2014;SiH&#x2014;CH&#x2014;SiH&#x2014;], and [&#x2014;N(SiH&#x2014;CH&#x2014;SiH)&#x2014;SiH&#x2014;CH&#x2014;SiH&#x2014;].

Si-containing film forming compositions and methods of making and using the same

Solid or liquid N&#x2014;H free, C-free, and Si-rich perhydropolysilazane compositions comprising units having the following formula [&#x2014;N(SiH)(SiH&#x2014;)], wherein x=0, 1, or 2 and y=0, 1, or 2 when x+y=2; and x=0, 1 or 2 and y=1, 2, or 3 when x+y=3 are disclosed. Also disclosed are synthesis methods and applications for the same.

N&#x2014;H free and Si-rich per-hydridopolysilzane compositions, their synthesis, and applications

Methods of synthesizing Si&#x2014;H containing iodosilanes, such as diiodosilane or pentaiododisilane, using a halide exchange reaction are disclosed.

Preparation of Si-H containing iodosilanes via halide exchange reaction

N&#x2014;H free and SI-rich per-hydridopolysilzane compositions, their synthesis, and applications

Methods for forming a SiN-containing film are disclosed. The methods use film-forming compositions comprising Si&#x2014;N containing precursors. Also disclosed are methods of synthesizing the same and methods of using the same for vapor deposition. In particular, a catalytic dehydrogenative coupling of carbosilanes with ammonia, amines and amidines produces the Si&#x2014;N containing precursors.

Method of forming a silicon nitride film using Si&#x2014;N containing precursors

Preparation of Si&#x2014;H containing iodosilanes via halide exchange reaction

Disclosed are methods of selectively synthesizing inorganic silanes, such as halosilane and dihalosilane, comprising the step of reacting the halide or halogen (i.e., HX or Xwherein X is Cl, Br, or I) with RSiH, wherein R is an unsaturated C4 to C8 cyclic hydrocarbon or heterocycle group, provided that a C6 cyclic aromatic includes at least one hydrocarbyl ligand, in the presence of a catalyst, to produce RH and the inorganic silane having the formula SiHX, wherein x=1-4; a=1-9; b=1-9; and a+b=2x+2.

Synthesis methods for halosilanes

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Princeton, NJ, United States of America

Sean Kerrigan