Brooks Automation Gmbh

Varian, Inc.

Sean E Plaisted

Anthony G Liepert

Leigh F Sharrock

Chris Aitken

A substrate transport apparatus including; a frame, a substrate transport arm connected to the frame, the substrate transport arm having an end effector, and a drive section having at least one motor coupled to the substrate transport arm, wherein the at least one motor defines a kinematic portion of the drive section configured to effect kinematic motion of the substrate transport arm, and the drive section includes an accessory portion adjacent the kinematic portion, wherein the accessory portion has another motor, different and distinct from the at least one motor, the another motor of the accessory portion is operably coupled to and configured to drive one or more accessory device independent of the kinematic motion of the substrate transport arm.

Substrate transport apparatus with independent accessory feedthrough

Scroll pumping apparatus includes a first scroll element and a second scroll element, a drive mechanism operatively coupled to the second scroll element for producing orbiting motion of the second scroll element relative to the first scroll element, and a synchronization device including a strip having connected, substantially flat sections, coupled between the first scroll element and the second scroll element. The synchronization device may have a generally square configuration.

Growing community of inventors

Newburyport, MA, United States of America

Sean E Plaisted