Taiwan Semiconductor Manufacturing Comp. Ltd.

Sean Cheng

Chun-Ren Cheng

Jui-Cheng Huang

Tung-Tsun Chen

Shih-Fen Huang

Yu-Jie Huang

Chin-Hua Wen

Ching-Hui Lin

Hector Chang

Yi-Hsien Chang

Yi-hsien Chang

A bioFET device includes a semiconductor substrate having a first surface and an opposite, parallel second surface and a plurality of bioFET sensors on the semiconductor substrate. Each of the bioFET sensors includes a gate formed on the first surface of the semiconductor substrate and a channel region formed within the semiconductor substrate beneath the gate and between source/drain (S/D) regions in the semiconductor substrate. The channel region includes a portion of the second surface of the semiconductor substrate. An isolation layer is disposed on the second surface of the semiconductor substrate. The isolation layer has an opening positioned over the channel region of more than one bioFET sensor of the plurality of bioFET sensors. An interface layer is disposed on the channel region of the more than one bioFET sensor in the opening.

Bio-field effect transistor device

Growing community of inventors

Hsinchu, Taiwan

Sean Cheng