Motorola Corporation

Freescale Semiconductor,inc.

Other

Nxp Usa, Inc.

Scott S Roth

Howard C Kirsch

Kent J Cooper

Wayne J Ray

Carlos A Mazure

Jung-Hui Lin

Alexander J Pepe

William C McFadden

Bich-Yen Nguyen

James D Hayden

Varughese Mathew

Michael P Woo

Sheila F Chopin

Bernard J Roman

Min Ding

Philip J Tobin

Barbara Vasquez

Yasunobu Kosa

Michael P Masquelier

Mahbub M Rashed

Joe Steinberg

E Petyr Wachholz

Glenn Wissen

Jason C Perkey

Mohammed K Rashid

John H Sweeney

Tim J Zoerner

H Scott Morgan

A packaged semiconductor device is made by forming a conductive pad on an external surface of an integrated circuit device, forming a passivation layer over the conductive pad, removing a portion of the passivation layer over a bond area on the conductive pad, forming a sacrificial anode around a majority of a periphery surrounding the bond area, forming a conductive bond in the bond area, and forming an encapsulating material around the conductive bond and an exposed portion of the sacrificial anode.

Semiconductor structure with sacrificial anode and method for forming

Semiconductor structure with sacrificial anode and passivation layer and method for forming

A circuit comprises a first conductor, a second conductor, and a first detect and disconnect circuit. The first conductor is coupled to a first power supply voltage terminal. The second conductor is positioned a first predetermined distance from the first conductor. The first detect and disconnect circuit has a first terminal coupled to the second conductor and a second terminal coupled to a second power supply voltage terminal. The first detect and disconnect circuit detects a first electrical property change between the second conductor and the first conductor. In response to detecting the change in the first electrical property, the second conductor is disconnected from the second power supply voltage terminal. A method for manufacturing a semiconductor device comprising the circuit is also provided.

Monitor circuit for determining the lifetime of a semiconductor device

A method includes providing a wafer having a first die and a scribe grid, where the first die has die circuitry and a bond pad electrically connected to the die circuitry, and where the scribe grid has a scribe grid pad electrically connected to the die circuitry. The method further includes accessing the scribe grid pad to stimulate the die circuitry. A wafer includes a first die. The first die includes die circuitry, a plurality of conductive layers, and a bond pad electrically connected to the die circuitry via at least one conductive layer of the plurality of conductive layers. The wafer includes a scribe grid having a scribe grid pad, and an interconnect electrically connecting the scribe grid pad to the die circuitry. The plurality of die of the wafer can then be singulated, and at least one of the singulated die can be packaged.

Method of stimulating die circuitry and structure therefor

The horizontal surface area required to contact semiconductor devices, in integrated circuits fabricated with trench isolation, is minimized without degrading contact resistance by utilizing the vertical surface area of the trench sidewall. A trench isolation region (,) is formed within the semiconductor substrate (,). A doped region (,) is then formed such that it abuts the trench sidewall (,). A portion (,) of the trench sidewall (,), abutting the doped region (,), is then exposed by forming a recess (,) within the trench isolation region (,). A conductive member (,) is then formed such that it is electrically coupled to the doped region (,) along the exposed trench sidewall, as well as along the major surface (,) of the semiconductor substrate (,), and results in the formation of a low resistance contact structure.

Contact structure and method of formation

The present invention includes a transistor having a channel region with a first and second section, wherein the sections have lengths that generally perpendicular to one another. The prevent invention also includes the transistor in an SRAM cell and processes for forming the transistor and the SRAM cell. In the embodiments that are described, the first section has a length that is generally vertical and the second section has a length that is generally extends in a lateral direction. The first section may be an undoped or lightly doped portion of a silicon plug. The plug may be formed including an etching or polishing step.

Transistor having an offset channel section

A floating gate (51)is formed to have a cavity (52) that increases the capacitive coupling between the floating gate (51) and a control gate for the memory cell. The memory cell may be used in EPROM, EEPROM, and flash EEPROM arrays and may be programmed and erased by hot carrier injection, Fowler-Nordheim tunneling or the like. The process sequence for forming the cavity (52) of the floating gate (51) has good process margin allowing some lithographic misalignment. In one embodiment, a multi-tiered floating gate may be formed. The multi-tier structure allows the capacitive coupling to further increase without occupying more area.

Electrically programmable read-only memory cell

The horizontal surface area required to contact semiconductor devices, in integrated circuits fabricated with trench isolation, is minimized without degrading contact resistance by utilizing the vertical surface area of the trench sidewall. A trench isolation region (40) is formed within the semiconductor substrate (12). A doped region (74, 96) is then formed such that it abuts the trench sidewall (24). A portion (56, 110) of the trench sidewall (24), abutting the doped region (74, 96), is then exposed by forming a recess (55, 112) within the trench isolation region (40). A conductive member (66, 114, 118) is then formed such that it is electrically coupled to the doped region (74, 96) along the exposed trench sidewall, as well as along the major surface (13) of the semiconductor substrate (12), and results in the formation of a low resistance contact structure.

Method of making a contact structure

A method for forming a vertical neuron MOSFET begins by providing a substrate (12). One or more conductive layers (24 and 28) are formed overlying the substrate (12). An opening (32) is formed through a portion of the conductive layers (24 and 28) to form one or more control electrodes from the conductive layers (24 and 28). A floating gate (36, and 38) is formed adjacent each of the control electrodes. A dielectric layer (34) is formed within the opening (32) and between the control electrodes and the floating gate (36, and 38) to provide for capacitive coupling between the control electrodes and the floating gate (36, and 38). The capacitive coupling may be altered for each control electrode via isotropic sidewall etching and other methods. By forming the neuron MOSFET in a vertical manner, a surface area of the neuron MOSFET is reduced when compared to known neuron MOSFET structures.

Vertically formed neuron transister having a floating gate and a control

A floating gate (51) is formed to have a cavity (52) that increases the capacitive coupling between the floating gate (51) and a control gate for the memory cell. The memory cell may be used in EPROM, EEPROM, and flash EEPROM arrays and may be programmed and erased by hot carrier injection, Fowler-Nordheim tunneling or the like. The process sequence for forming the cavity (52) of the floating gate (51) has good process margin allowing some lithographic misalignment. In one embodiment, a multi-tiered floating gate may be formed. The multi-tier structure allows the capacitive coupling to further increase without occupying more area.

Process for forming an electrically programmable read-only memory cell

A contact is formed in a semiconductor device (10), independent of underlying topography or pitch. In one method of the present invention, an insulating layer (18) is deposited over a semiconductor substrate (12). An etch stop layer (20) is deposited over the insulating layer. A frame structure (22) is formed on the etch stop material and defines at least one contact region (23 and/or 25) within which the etch stop material is exposed. The exposed portions of the etch stop material are removed from the contact region to expose a portion of the insulating layer. The exposed portion of the insulating layer is then anisotropically etched and at least one contact (30 and/or 32) is formed in the contact region. Depending on where the contact region is positioned, either a self-aligned contact or a non-self-aligned contact may be formed, or both types of contacts may be formed simultaneously.

Method for forming contact to a semiconductor device

Method of making a vertically formed neuron transistor having a floating

A method for the fabrication of a trench isolation region (44) includes the deposition of first, second, and third oxidizable layers (28, 34, 42). The first oxidizable layer (28) is deposited to overlie the surface of a trench (12) formed in a semiconductor substrate (10). The first oxidizable layer (28) also fills a recess (26) formed in a masking layer (14), and resides adjacent to the upper surface of the trench (12). After oxidizing the first oxidizable layer (28), a second oxidizable layer (34) is deposited to fill the trench (12). A third oxidizable layer (42) is deposited to overlie the second oxidizable layer (34) and fills a remaining portion of the recess (26). An oxidation process is performed to oxidize oxidizable layer (42) and a portion of second oxidizable layer (34) to form a trench isolation region (44). In an alternative embodiment of the invention, a shallow isolation region (46) is formed in proximity to the trench isolation region ( 44).

Encapsulation method for localized oxidation of silicon with trench

A silicon-on insulator film (38) is formed by solid phase epitaxial re-growth. A layer of amorphous silicon (36) is formed such that it is only in direct contact with an underlying portion of a silicon substrate (12). The layer of amorphous silicon (36) is subsequently annealed to form a monocrystalline layer of epitaxial silicon (38). Because the amorphous silicon layer (36) is in contact with only the silicon substrate (12), during the re-growth process, the resulting epitaxial layer (38) is formed with a reduced number of crystal defects. The resulting epitaxial silicon layer (38) may then be used to form semiconductor devices.

Semiconductor device and method of formation

A thin film transistor with self-aligned source and drain regions is fabricated, in one embodiment, by forming an opening (124) in a dielectric layer (118) which overlies a substrate (116). A semiconductive sidewall spacer (130) is formed around the perimeter (126) of the opening (124) and adjacent to the sidewall (128) of the opening (124). A first electrode region (120) is electrically coupled to a first portion of the semiconductive sidewall spacer (130) at a first location along the perimeter (126) of the opening (124) which lies only in the second lateral half of the opening (124). A second electrode region (122) is electrically coupled to a second portion of the semiconductive sidewall spacer (130) at a second location along the perimeter (126) of the opening (124) which lies only in the first lateral half of the opening (124). A dielectric layer (132) is formed adjacent to the semiconductive sidewall spacer (130). A control electrode (134) is formed adjacent to the dielectric layer (132).

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Austin, TX, United States of America

Scott S Roth