Valin Corporation

Scott R Mobley

Andrew K Lorenz

A purging apparatus having a process gas connector wherein a purging gas is injected into the connector so that trapped process gas is thoroughly purged from the connector. Tubing in the shape of a double helix is connected to the process gas connector. One tube of the double helix is connected to a purge valve for providing purging gas to an injection port of the process gas connector. The other tube of the double helix provides a flow path for the process gas which then flows through a filter, a vacuum pump valve, a high pressure process valve, a regulator, a low pressure process valve, and then out to the process equipment. In order to purge the process gas from the purging apparatus, the high pressure process valve is set to direct a gas flow to a vent valve which is connected to a scrubber. The low pressure process valve may also be set to direct gas flow to a low pressure vent valve which is also connected to a scrubber. Finally, the purging apparatus may be evacuated by setting the vacuum pump valve to permit gas to be evacuated from the purging apparatus.

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Los Gatos, CA, United States of America

Scott R Mobley