Average Co-Inventor Count = 6.00
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Ultratech, Inc. (3 from 135 patents)
3 patents:
1. 8017424 - Dual-sided substrate measurement apparatus and methods
2. 7902040 - Dual-sided substrate measurement apparatus and methods
3. 7528937 - Dual-sided substrate measurement apparatus and methods