Illinois Tool Works Inc.

Scott E Shirey

Joseph C Dille

Andrew C Dymek

Sean C Dunn

The disclosed embodiments include a valve assembly () that includes a piezo stack (); a piezo actuator () encompassing the piezo stack, the piezo actuator having flexural elements () that provide a stroke multiplier that amplifies movement of the piezo stack; a valve block () having an inlet flow path () and an outlet flow path (); a diaphragm () seated atop the valve block, wherein an outer part of the diaphragm is rigid and an inner part of the diaphragm is moveable in a vertical axis; and a bi-lateral flexure (), wherein a bottom part of the piezo actuator is mechanically attached to the diaphragm via the bi-lateral flexure.

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Telford, PA, United States of America

Scott E Shirey