Applied Materials, Inc.

Scott Dickerson

Anthony Vesci

Anantha K Subramani

Joseph Frederick Sommers

Marc O'Donnell Schweitzer

Jennifer Watia Tiller

Stephen Abney

A method of fabricating a component for a substrate processing chamber involves providing a preform having internal and external surfaces, and providing a mandrel having a textured surface with a pattern of textured features comprising protrusions and depressions. The internal surface of the preform component is contacted with the textured surface of mandrel, and a pressure is applied to the external surface of the preform. The pressure is sufficiently high to plastically deform the preform over the textured surface of the mandrel to form a component having a textured internal surface comprising the pattern of textured feature that are shaped and sized to adhere process residues generated in the processing of substrates.

Flow-formed chamber component having a textured surface

A method of fabricating a sputtering target for sputter depositing material onto a substrate in a sputtering chamber is described. In one embodiment of the method, a preform having a surface is formed and a layer of sputtering material is electroplated onto the surface of the preform to form the target. The method can be applied to form a sputtering target having a non-planar surface.

Electroformed sputtering target

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Lakewood, CO, United States of America

Scott Dickerson