University of Maine System

Stillwater Scientific Instruments

Scott Collins

Brian G Frederick

Rosemary L Smith

Lawrence J LeGore

Robert H Jackson, Iii

A grid structure and method for manufacturing the same. The grid is used for gating a stream of charged particles in certain types of particle measurement instruments, such as ion mobility spectrometers and the like. The methods include various microfabrication techniques for etching and/or depositing grid structure materials on a silicon substrate.

Microfabricated miniature grids

The present invention relates generally to grids for gating a stream of charged particles and methods for manufacturing the same. In one embodiment, the present invention relates to a Bradbury-Nielson gate having transmission line grid elements. In one embodiment is a feed structure for a gating grid where a drive source is coupled to a feeding transmission line with the same geometry as the chopper and continues with the same geometry to a termination transmission line. Also included is a method for fabricating a gate for charged particles which includes micromachining at least two gate elements from at least one wafer, wherein each gate element includes at least one grid element; metalizing the grid elements; and assembling the gate elements such that the grid elements of the gate elements are interleaved, thereby forming a Bradbury Nielson gate.

Growing community of inventors

Bangor, ME, United States of America

Scott Collins