Seh America, Inc.

Scott Alan Cann

Michael Huston

Sergey N Altukhov

Curtis Paul Buchanan

Thomas Read Paine

A slurry recycling apparatus having a first filter, a dirty side storage tank, slurry pump, second filter, clean side storage tank and slurry outlet, in which used slurry from an edge notch polishing apparatus is delivered to the first screen filter, transported to the dirty side slurry storage tank, pumped from the dirty side slurry storage tank through a second filter that filters out small particulate matter from the slurry and allows the slurry to pass to the clean side slurry storage tank, and finally to the edge notch polishing apparatus as needed. Slurry which is not immediately taken from the clean side slurry storage tank is continuously recycled through the second filter by overflowing from the clean side to the dirty side slurry storage tank where it is there pumped through the second filter back into the clean side slurry storage tank.

Method and apparatus for recycling slurry

In a semiconductor manufacturing process in which wafers are analyzed using a wafer image (ADS) vision system and automated dimensioning equipment (ADE), an automated communication interface system is provided. The interface system uses a programmable logic controller in combination with relays to communicate signals between the ADS vision system and the automated dimensioning equipment in response to signal indications in both. The programmable logic controller includes a plurality of timers for generating signals of selected duration as well as time delays of selected duration. The relays permit signals to be communicated in the face of signal system incompatibility between components. When a wafer in the automated dimensioning equipment is ready for optical analysis, the interface system responds by sending a start signal to the ADS vision system, which responds by analyzing the wafer and providing accept or reject indications. Signals representing the accept or reject indications are communicated to the automated dimensioning equipment, followed by an enter signal which is required by such equipment. The interface keeps track of the number of times the ADS vision system takes longer than a first predetermined time interval to provide an accept or reject indication, and sets off an alarm when the accept or reject indication does not occur until after a second time delay.

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Washougal, WA, United States of America

Scott Alan Cann