Carl Zeiss Smt Gmbh

Carl-Zeiss-Smt Ag

Saverio Sanvido

Yim-Bun Patrick Kwan

Stefan Xalter

Hermann Bieg

Karl-Eugen Aubele

Uy-Liem Nguyen

Martin Schmidt

An optical assembly supported in an arrangement, especially in an objective or in an illuminating or exposure system, in the interior of a housing comprising at least one optical element, especially a lens, a mirror, or an aperture, wherein the at least one element is influenceable by at least one manipulator is characterized in that the at least one manipulator is arranged either outside of the housing or in a holding means that is separated entirely or to a large extent by the help of a decoupling means, and that there is provided an effective coupling between the manipulator and the element to be influenced by the manipulator in the interior of the arrangement.

Optical assembly

Growing community of inventors

Glattbrugg/ZH, Switzerland

Saverio Sanvido