E.i. Dupont De Nemours and Company

Sau Lan Tang

Robert Valentine Kasowski

James William Ashmead

A polymer-based microfluidic device and its manufacturing methods. This microfluidic device is suitable for chromatographic and electrophoretic separations in which the detection of the components in the fluid is by means of ultraviolet (UV) spectroscopy. The device further comprises at least one cooling channel adjacent the separation channel, said cooling channel conducting a cooling fluid through the device for removing heat from the the separation channel. At least one section of the separation channel has an increased cross-sectional dimension with respect to other sections of said channel to provide an increased optical path length when the device is used in an ultraviolet detection arrangement.

Polymeric microfabricated fluidic device suitable for ultraviolet detection

A method for improving the resolution of an electron resist pattern on a substrate coated with a polymeric electron resist film is disclosed which provides an external coating layer of dried polymer selected from the group consisting of water-soluble polymers and poly(m-phenylene isophthalamide), or of a mixture consisting essentially of said dried polymer and hexavalent tungsten compounds wherein the weight ratio of the tungsten compounds to polymer is up to about 1:1. Also disclosed are substrates coated with a polymeric resist film wherein the resist film consists essentially of such external layers, or wherein an external coating layer of said polymer-tungsten compound mixture is provided.

Electron beam lithography

Improved fabrication processes for preparation of nanometer scale structures wherein a polymeric coating is applied to the substrate prior to fabrication are disclosed.

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Hockessin, DE, United States of America

Sau Lan Tang