Average Co-Inventor Count = 2.40
ph-index = 3
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tokyo Electron Limited (3 from 10,381 patents)
3 patents:
1. 6442446 - Control apparatus
2. 6233492 - Process control system and method for transferring process data therefor
3. 6122556 - Operating system for fabrication apparatus