Gigaphoton Inc.

Komatsu Corporation

Keihin Corporation

Satoshi Tanaka

Osamu Wakabayashi

Kouji Kakizaki

Junichi Fujimoto

Norihide Mizoguchi

Toru Suzuki

Shinji Nagai

Hiroshi Tanaka

Hideo Hoshino

Hiroaki Tsushima

Takahito Kumazaki

Takeshi Asayama

Akiyoshi Suzuki

Hisakazu Katsuumi

Youichi Sasaki

Kuniaki Takahashi

Yousuke Fujimaki

Kouji Uematsu

Kazusa Sato

Motoki Akimoto

Tatsuya Miura

Soichiro Nao

Provided is a laser annealing apparatus causing laser light to be radiated to processing receiving areas arranged, out of a first direction and a second direction perpendicular to the first direction, along at least the second direction and move a batch radiation area and a workpiece in the first direction, and the laser annealing apparatus includes an energy density measuring apparatus measuring the energy density at, out of first and second ends of the batch radiation area in the second direction, at least the second end, an energy density adjusting apparatus adjusting the energy density at the first end, and a controller controlling the energy density adjusting apparatus. The energy density at the first end when (N+1)-th scanning is performed is so adjusted that the energy density at the first end in an (N+1)-th scan area approaches the energy density at the second end in the N-th scan area.

Laser annealing apparatus and method for manufacturing electronic device

A laser gas regenerating apparatus regenerates a discharged gas discharged from at least one ArF excimer laser apparatus and supplies the regenerated gas to the at least one ArF excimer laser apparatus connected to a first laser gas supply source that supplies a first laser gas and to a second laser gas supply source that supplies a second laser gas. The laser gas regenerating apparatus includes a data obtaining unit that obtains data on a supply amount of the second laser gas supplied to the at least one ArF excimer laser apparatus; a xenon adding unit that adds, to the regenerated gas, a third laser gas; and a control unit that controls, based on the supply amount, an addition amount of the third laser gas by the xenon adding unit.

Laser gas regenerating apparatus and electronic device manufacturing method

To cool a capacitor including a first electrode and a second electrode, a capacitor cooling structure includes: a conducting part electrically connected with the first electrode; an insulating part that has a first surface including a first position and a second surface including a second position, and is connected with the conducting part at the first position; a first fastening part configured to fasten the conducting part and the insulating part to each other; and a cooling part connected with the second position facing the first position, the conducting part and the cooling part being electrically insulated from each other by the insulating part.

Capacitor cooling structure and laser apparatus

A sealing member and an air intake controller are disclosed herein. The sealing member includes an inner cylindrical section having a gradually-decreasing-diameter portion which has a diameter that gradually decreases in one direction, an outer cylindrical section having a gradually-increasing-diameter portion which has a diameter that gradually increases in the one direction, and an annular connecting section which connects the inner cylindrical section and the outer cylindrical section at an end portion on the side in the opposite direction from the one direction. The outer cylindrical section has an extended cylindrical portion, the outer diameter of which gradually decreases in the one direction. An air intake controller can incorporate the sealing member that is disclosed herein between a shaft holeand a valve shaft.

Sealing member and air intake controller

A fuel supply device for an engine is provided in which a throttle body is provided with an electrically operated fuel pump, wherein a base member integrally having a base portion that extends in the vertical direction on one side of the throttle body and a housing tube portion that is formed into a bottomed tube shape having an end wall communicating with the base portion is linked integrally to a body, a pump housing case that forms a fuel storage chamber is formed from the housing tube portion and a bottomed tubular housing cover joined to the housing tube portion via a seal member and is disposed beneath the body, and a vapor discharge path for discharging vapor generated in a fuel storage chamber is formed in the base portion so as to extend in the vertical direction and communicate with the fuel storage chamber.

Fuel supply device for engine

A cooling-fan control device for a vehicle that increases the cooling capacity of a cooling oil that cools a brake rapidly and inhibits a brake damage in a case where the brake is applied during traveling or, in addition to the above-described problem-to-be-resolved, suppresses engine horsepower consumption and avoids consumption increase, while increasing the cooling capacity of the brake cooling oil. The rotation speed of the cooling fan is controlled to obtain the higher target rotation speed of a first target rotation speed corresponding to a detected cooling oil temperature and a second target rotation speed corresponding to a detected brake operation amount. The present invention is applicable to a vehicle in which an engine power is distributed to a travel power train and a hydraulic pump, drive wheels are operated via the travel power train, and the cooling fan is actuated via the hydraulic pump.

Control device for cooling fan for vehicle

A hydraulic oil supply device includes: a work equipment pump that supplies a hydraulic oil to a hydraulic actuator that drives a work equipment; a fan pump that supplies the hydraulic oil to a hydraulic motor that drives a cooling fan; and a circuit switching valve provided on a hydraulic circuit being branched from a hydraulic circuit connecting the hydraulic actuator with the work equipment pump to be connected to the fan pump, the circuit switching valve selectively connecting a discharge portion of the fan pump to the hydraulic actuator and the hydraulic motor.

Operating oil supplying device and construction machine

A master oscillator system may include a grating configured to function as one resonator mirror in an optical resonator, a spectral bandwidth tuning unit configured to tune the spectral bandwidth of a laser beam transmitted within the optical resonator, a storage unit configured to store a control value of the spectral bandwidth tuning unit corresponding to a desired spectral bandwidth and a controller configured to control the spectral bandwidth tuning unit based on the control value stored in the storage unit.

Master oscillator system and laser apparatus

This disclosure is directed to widen an adjustable range of the spectral linewidth of laser light output from a laser apparatus. This laser apparatus may include: (1) an excitation source configured to excite a laser medium in a laser gain space, (2) an optical resonator including an output coupler arranged on one side of an optical path through the laser gain space and a wavelength dispersion element arranged on the other side of the optical path through the laser gain space, and (3) a switching mechanism configured to switch a beam-width magnification or reduction factor by placing or removing at least one beam-width change optical system for expanding or reducing a beam width in or from an optical path between the laser gain space and the wavelength dispersion element or by inverting orientation of the at least one beam-width change optical system in the optical path.

Laser apparatus

At least either of the light entering plane or the light exiting plane is parallel to the (111) crystal face of the CaFcrystal and the laser beam entering from the entering plane passes through the plane located between the [111] axis and the first azimuth axis in the locus of rotation of the [001] axis around the [111] axis and including the [111] axis and the first azimuth axis, the plane located between the [111] axis and the second azimuth axis in the locus of rotation of the [010] axis around the [111] axis and including the [111] axis and the second azimuth axis or the plane located between the [111] axis and the third azimuth axis in the locus of rotation of the [100] axis around the [111] axis and including the [111] axis and the third azimuth axis and exits from the exiting plane.

Optical element for gas laser and gas laser apparatus using the same

The present invention relates to a long pulse gas laser apparatus for lithography further improved in the laser oscillation efficiency and stability increased by addition of xenon gas. A gas laser apparatus for lithography has a pair of discharge electrodesprovided in a laser chamberand emits laser beam having a laser pulse width (T) of not less than 40 ns by exciting a laser gas sealed in the laser chamberby electric discharge between the pair of discharge electrodes, the laser gas containing xenon in an amount not less than 2 ppm and not more than 100 ppm in partial pressure ratio. The laser gas has been heated at least when the laser beam is emitted.

Gas laser apparatus for lithography

The invention provides an emergency brake apparatus for a vehicle which can brake both of front and rear tire wheels of a vehicle by using an oil pressure, at an emergency time. For this purpose, a pressure oil of a hydraulic power source is changed to a pilot oil pressure which is reduced from a high pressure to a low pressure in correspondence to an operation amount of an emergency brake valve () operated at the emergency time, and this pressure is output to a relay valve (). The pressure oil of the hydraulic power source is increased in an inverse proportional manner from a low pressure to a high pressure in correspondence to the pilot oil pressure, and this pressure is output to a front tire wheel brake (), thereby urgently braking the front tire wheel.

Emergency brake apparatus for vehicle

The invention provides a shift control apparatus of a working vehicle in which an excellent shift operability can be obtained without reference to an incline of a travelling road, a loading amount and a road condition without necessity of learning a time for controlling an engine. Accordingly, a controller outputs a command for setting a hydraulic pressure (Pn) of a clutch before a shift operation to 0 value at a time of starting the shift operation and a command for making a hydraulic pressure (Pa) of a clutch after the shift operation be gradually increased in point of time to an electromagnetic proportional control valve (,), changes a fuel injection amount command signal (Fi) to a fuel injection apparatus (,) from an accelerator injection amount signal (THo) on the basis of an accelerator pedal operating amount to a synchronous injection amount signal (THc) for controlling an engine rotational speed so that an absolute value of an input shaft conversion relative speed (Nr) is reduced, and changes the fuel injection amount command signal (Fi) from the synchronous injection amount signal (THc) to the accelerator injection amount signal (THo) when the absolute value of the input shaft conversion relative speed becomes smaller than a predetermined threshold (dNr).

Growing community of inventors

Oyama, Japan

Satoshi Tanaka